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Imaging of strain and lattice orientation by quick scanning X-ray microscopy combined with three-dimensional reciprocal space mapping

Chahine, Gilbert André ; Richard, Marie Ingrid ; Homs-Regojo, Roberto Arturo ; Tran-Caliste, Thu Nhi ; Carbone, Dina LU ; Jaques, Vincent Louis Robert ; Grifone, Raphael ; Boesecke, Peter ; Katzer, Jens and Costina, Ioan , et al. (2014) In Journal of Applied Crystallography 47(2). p.762-769
Abstract

Numerous imaging methods have been developed over recent years in order to study materials at the nanoscale. Within this context, scanning X-ray diffraction microscopy has become a routine technique, giving access to structural properties with sub-micrometre resolution. This article presents an optimized technique and an associated software package which have been implemented at the ID01 beamline (ESRF, Grenoble). A structural scanning probe microscope with intriguing imaging qualities is obtained. The technique consists in a two-dimensional quick continuous mapping with sub-micrometre resolution of a sample at a given reciprocal space position. These real space maps are made by continuously moving the sample while recording scattering... (More)

Numerous imaging methods have been developed over recent years in order to study materials at the nanoscale. Within this context, scanning X-ray diffraction microscopy has become a routine technique, giving access to structural properties with sub-micrometre resolution. This article presents an optimized technique and an associated software package which have been implemented at the ID01 beamline (ESRF, Grenoble). A structural scanning probe microscope with intriguing imaging qualities is obtained. The technique consists in a two-dimensional quick continuous mapping with sub-micrometre resolution of a sample at a given reciprocal space position. These real space maps are made by continuously moving the sample while recording scattering images with a fast two-dimensional detector for every point along a rocking curve. Five-dimensional data sets are then produced, consisting of millions of detector images. The images are processed by the user-friendly X-ray strain orientation calculation software (XSOCS), which has been developed at ID01 for automatic analysis. It separates tilt and strain and generates two-dimensional maps of these parameters. At spatial resolutions of typically 200-800 nm, this quick imaging technique achieves strain sensitivity below Δa/a = 10-5 and a resolution of tilt variations down to 10-3° over a field of view of 100 × 100 μm.

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publishing date
type
Contribution to journal
publication status
published
keywords
data analysis software, lattice orientation, reciprocal space mapping, scanning probe microscopy, scanning X-ray diffraction microscopy, strain
in
Journal of Applied Crystallography
volume
47
issue
2
pages
8 pages
publisher
International Union of Crystallography
external identifiers
  • scopus:84897448976
ISSN
0021-8898
DOI
10.1107/S1600576714004506
language
English
LU publication?
no
id
53202edd-ff11-4717-9af4-c54a2d7627c0
date added to LUP
2021-12-15 11:45:49
date last changed
2022-04-19 18:44:49
@article{53202edd-ff11-4717-9af4-c54a2d7627c0,
  abstract     = {{<p>Numerous imaging methods have been developed over recent years in order to study materials at the nanoscale. Within this context, scanning X-ray diffraction microscopy has become a routine technique, giving access to structural properties with sub-micrometre resolution. This article presents an optimized technique and an associated software package which have been implemented at the ID01 beamline (ESRF, Grenoble). A structural scanning probe microscope with intriguing imaging qualities is obtained. The technique consists in a two-dimensional quick continuous mapping with sub-micrometre resolution of a sample at a given reciprocal space position. These real space maps are made by continuously moving the sample while recording scattering images with a fast two-dimensional detector for every point along a rocking curve. Five-dimensional data sets are then produced, consisting of millions of detector images. The images are processed by the user-friendly X-ray strain orientation calculation software (XSOCS), which has been developed at ID01 for automatic analysis. It separates tilt and strain and generates two-dimensional maps of these parameters. At spatial resolutions of typically 200-800 nm, this quick imaging technique achieves strain sensitivity below Δa/a = 10<sup>-5</sup> and a resolution of tilt variations down to 10<sup>-3</sup>° over a field of view of 100 × 100 μm.</p>}},
  author       = {{Chahine, Gilbert André and Richard, Marie Ingrid and Homs-Regojo, Roberto Arturo and Tran-Caliste, Thu Nhi and Carbone, Dina and Jaques, Vincent Louis Robert and Grifone, Raphael and Boesecke, Peter and Katzer, Jens and Costina, Ioan and Djazouli, Hamid and Schroeder, Thomas and Schülli, Tobias Urs}},
  issn         = {{0021-8898}},
  keywords     = {{data analysis software; lattice orientation; reciprocal space mapping; scanning probe microscopy; scanning X-ray diffraction microscopy; strain}},
  language     = {{eng}},
  number       = {{2}},
  pages        = {{762--769}},
  publisher    = {{International Union of Crystallography}},
  series       = {{Journal of Applied Crystallography}},
  title        = {{Imaging of strain and lattice orientation by quick scanning X-ray microscopy combined with three-dimensional reciprocal space mapping}},
  url          = {{http://dx.doi.org/10.1107/S1600576714004506}},
  doi          = {{10.1107/S1600576714004506}},
  volume       = {{47}},
  year         = {{2014}},
}