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Positioning of nanometer-sized particles on flat surfaces by direct deposition from the gas phase

Krinke, Thomas J. ; Fissan, Heinz ; Deppert, Knut LU ; Magnusson, Martin H. LU and Samuelson, Lars LU (2001) In Applied Physics Letters 78(23). p.3708-3710
Abstract

Arrangements of nanometer-sized particles were obtained on plane oxidized silicon substrates by direct deposition from the gas phase. The particles were attracted onto charge patterns created by contact charging. Monodisperse, singly charged indium aerosol particles with a diameter of 30 nm were used as a test case to illustrate this process. Due to the surface treatment, the deposition is highly selective. We were able to create lines of particles with widths as narrow as 100 nm and several millimeters in length. The resolution of the pattern depends mainly on the surface treatment and the tool geometry. Our approach opens the possibility of creating patterns composed of nanometer-sized particles on a flat substrate surface by the... (More)

Arrangements of nanometer-sized particles were obtained on plane oxidized silicon substrates by direct deposition from the gas phase. The particles were attracted onto charge patterns created by contact charging. Monodisperse, singly charged indium aerosol particles with a diameter of 30 nm were used as a test case to illustrate this process. Due to the surface treatment, the deposition is highly selective. We were able to create lines of particles with widths as narrow as 100 nm and several millimeters in length. The resolution of the pattern depends mainly on the surface treatment and the tool geometry. Our approach opens the possibility of creating patterns composed of nanometer-sized particles on a flat substrate surface by the simple transfer of charge patterns, without a lithographical process.

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organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Applied Physics Letters
volume
78
issue
23
pages
3 pages
publisher
American Institute of Physics (AIP)
external identifiers
  • scopus:0035806041
ISSN
0003-6951
DOI
10.1063/1.1377625
language
English
LU publication?
yes
id
54bd238b-2b4c-413e-ad96-3b04e3589bbd
date added to LUP
2019-05-08 16:18:01
date last changed
2020-12-29 03:24:02
@article{54bd238b-2b4c-413e-ad96-3b04e3589bbd,
  abstract     = {<p>Arrangements of nanometer-sized particles were obtained on plane oxidized silicon substrates by direct deposition from the gas phase. The particles were attracted onto charge patterns created by contact charging. Monodisperse, singly charged indium aerosol particles with a diameter of 30 nm were used as a test case to illustrate this process. Due to the surface treatment, the deposition is highly selective. We were able to create lines of particles with widths as narrow as 100 nm and several millimeters in length. The resolution of the pattern depends mainly on the surface treatment and the tool geometry. Our approach opens the possibility of creating patterns composed of nanometer-sized particles on a flat substrate surface by the simple transfer of charge patterns, without a lithographical process.</p>},
  author       = {Krinke, Thomas J. and Fissan, Heinz and Deppert, Knut and Magnusson, Martin H. and Samuelson, Lars},
  issn         = {0003-6951},
  language     = {eng},
  month        = {06},
  number       = {23},
  pages        = {3708--3710},
  publisher    = {American Institute of Physics (AIP)},
  series       = {Applied Physics Letters},
  title        = {Positioning of nanometer-sized particles on flat surfaces by direct deposition from the gas phase},
  url          = {http://dx.doi.org/10.1063/1.1377625},
  doi          = {10.1063/1.1377625},
  volume       = {78},
  year         = {2001},
}