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Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Beck, Marc LU ; Persson, F ; Carlberg, Patrick LU ; Graczyk, Mariusz LU ; Maximov, Ivan LU ; Ling, TGI and Montelius, Lars LU (2004) In Microelectronic Engineering 73-74. p.837-842
Abstract
Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.
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author
; ; ; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
transducer, nanoimprint lithography, sensor, redox cycling, interdigitated array electrode
in
Microelectronic Engineering
volume
73-74
pages
837 - 842
publisher
Elsevier
external identifiers
  • wos:000222145400149
  • scopus:2542442954
ISSN
1873-5568
DOI
10.1016/j.mee.2004.03.061
language
English
LU publication?
yes
id
60fb51a9-2e2b-479d-a091-af7a150a7757 (old id 274500)
date added to LUP
2016-04-01 11:42:53
date last changed
2022-03-12 23:39:24
@article{60fb51a9-2e2b-479d-a091-af7a150a7757,
  abstract     = {{Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.}},
  author       = {{Beck, Marc and Persson, F and Carlberg, Patrick and Graczyk, Mariusz and Maximov, Ivan and Ling, TGI and Montelius, Lars}},
  issn         = {{1873-5568}},
  keywords     = {{transducer; nanoimprint lithography; sensor; redox cycling; interdigitated array electrode}},
  language     = {{eng}},
  pages        = {{837--842}},
  publisher    = {{Elsevier}},
  series       = {{Microelectronic Engineering}},
  title        = {{Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography}},
  url          = {{http://dx.doi.org/10.1016/j.mee.2004.03.061}},
  doi          = {{10.1016/j.mee.2004.03.061}},
  volume       = {{73-74}},
  year         = {{2004}},
}