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Early stage of ripple formation on Ge(001) surfaces under near-normal ion beam sputtering

Carbone, D. LU ; Alija, A. ; Plantevin, O. ; Gago, R. ; Facsko, S. and Metzger, T. H. (2008) In Nanotechnology 19(3).
Abstract

We present a study of the early stage of ripple formation on Ge(001) surfaces irradiated by a 1 keV Xe+ ion beam at room temperature and near-normal incidence. A combination of a grazing incidence x-ray scattering technique and atomic force microscopy allowed us to observe a variation of the symmetry of the surface nanopattern upon increase of the ion fluence. The isotropic dot pattern formed during the first minutes of sputtering evolves into an anisotropic ripple pattern for longer sputtering time. These results provide a new basis for further steps in the theoretical description of the morphology evolution during ion beam sputtering.

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author
; ; ; ; and
publishing date
type
Contribution to journal
publication status
published
in
Nanotechnology
volume
19
issue
3
article number
035304
publisher
IOP Publishing
external identifiers
  • scopus:38649126222
ISSN
0957-4484
DOI
10.1088/0957-4484/19/03/035304
language
English
LU publication?
no
id
823b5e51-8a15-42c8-be5b-d8a636db5483
date added to LUP
2021-12-15 11:54:28
date last changed
2022-02-02 02:08:42
@article{823b5e51-8a15-42c8-be5b-d8a636db5483,
  abstract     = {{<p>We present a study of the early stage of ripple formation on Ge(001) surfaces irradiated by a 1 keV Xe<sup>+</sup> ion beam at room temperature and near-normal incidence. A combination of a grazing incidence x-ray scattering technique and atomic force microscopy allowed us to observe a variation of the symmetry of the surface nanopattern upon increase of the ion fluence. The isotropic dot pattern formed during the first minutes of sputtering evolves into an anisotropic ripple pattern for longer sputtering time. These results provide a new basis for further steps in the theoretical description of the morphology evolution during ion beam sputtering.</p>}},
  author       = {{Carbone, D. and Alija, A. and Plantevin, O. and Gago, R. and Facsko, S. and Metzger, T. H.}},
  issn         = {{0957-4484}},
  language     = {{eng}},
  month        = {{01}},
  number       = {{3}},
  publisher    = {{IOP Publishing}},
  series       = {{Nanotechnology}},
  title        = {{Early stage of ripple formation on Ge(001) surfaces under near-normal ion beam sputtering}},
  url          = {{http://dx.doi.org/10.1088/0957-4484/19/03/035304}},
  doi          = {{10.1088/0957-4484/19/03/035304}},
  volume       = {{19}},
  year         = {{2008}},
}