From InGaN pyramids to micro-LEDs characterized by cathodoluminescence
Gustafsson, Anders LU
; Bi, Zhaoxia
LU
and Samuelson, Lars
LU
(2021)
In Nano Express
2(1).
- Abstract
- We present a study of the optical properties of various steps in the process of fabricating micro light-emitting diodes (μ-LEDs) based on quantum wells embedded in micron-sized InGaN platelets. In this study, we focus on structures for red emission, but the technology is equally suitable for the less technologically challenging blue and green emitting μ-LEDs. The starting point is growth of an InGaN pyramid with a sub-micron sized hexagonal base. The pyramid is flattened to create a flat top c-facet for the subsequent InGaN quantum well growth. We compare two approaches, reshaping of the pyramid by high-temperature annealing; and by chemical mechanical polishing. Their merits are discussed. The flattened platelets are used as templates to... (More)
- We present a study of the optical properties of various steps in the process of fabricating micro light-emitting diodes (μ-LEDs) based on quantum wells embedded in micron-sized InGaN platelets. In this study, we focus on structures for red emission, but the technology is equally suitable for the less technologically challenging blue and green emitting μ-LEDs. The starting point is growth of an InGaN pyramid with a sub-micron sized hexagonal base. The pyramid is flattened to create a flat top c-facet for the subsequent InGaN quantum well growth. We compare two approaches, reshaping of the pyramid by high-temperature annealing; and by chemical mechanical polishing. Their merits are discussed. The flattened platelets are used as templates to grow low-strain single quantum wells in both heterostructures and full LEDs including n- and p-barriers on either side of the quantum well. The structures are investigated in terms of homogeneity in peak energy position and intensity using hyperspectral cathodoluminescence imaging. We observe that the main contribution to inhomogeneity is the growth of the initial pyramid, that exhibits regular, facet driven variations in the In incorporation. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/91223684-b83a-4f14-b685-7b4362f8d0d0
- author
- Gustafsson, Anders
LU
; Bi, Zhaoxia
LU
and Samuelson, Lars
LU
- organization
- publishing date
- 2021-03-01
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Nano Express
- volume
- 2
- issue
- 1
- article number
- 014006
- publisher
- IOP Publishing
- external identifiers
-
- scopus:85129143545
- DOI
- 10.1088/2632-959X/abed3d
- language
- English
- LU publication?
- yes
- id
- 91223684-b83a-4f14-b685-7b4362f8d0d0
- alternative location
- https://iopscience.iop.org/article/10.1088/2632-959X/abed3d
- date added to LUP
- 2022-03-28 19:13:08
- date last changed
- 2023-11-19 09:45:00
@article{91223684-b83a-4f14-b685-7b4362f8d0d0,
abstract = {{We present a study of the optical properties of various steps in the process of fabricating micro light-emitting diodes (μ-LEDs) based on quantum wells embedded in micron-sized InGaN platelets. In this study, we focus on structures for red emission, but the technology is equally suitable for the less technologically challenging blue and green emitting μ-LEDs. The starting point is growth of an InGaN pyramid with a sub-micron sized hexagonal base. The pyramid is flattened to create a flat top c-facet for the subsequent InGaN quantum well growth. We compare two approaches, reshaping of the pyramid by high-temperature annealing; and by chemical mechanical polishing. Their merits are discussed. The flattened platelets are used as templates to grow low-strain single quantum wells in both heterostructures and full LEDs including n- and p-barriers on either side of the quantum well. The structures are investigated in terms of homogeneity in peak energy position and intensity using hyperspectral cathodoluminescence imaging. We observe that the main contribution to inhomogeneity is the growth of the initial pyramid, that exhibits regular, facet driven variations in the In incorporation.}},
author = {{Gustafsson, Anders and Bi, Zhaoxia and Samuelson, Lars}},
language = {{eng}},
month = {{03}},
number = {{1}},
publisher = {{IOP Publishing}},
series = {{Nano Express}},
title = {{From InGaN pyramids to micro-LEDs characterized by cathodoluminescence}},
url = {{http://dx.doi.org/10.1088/2632-959X/abed3d}},
doi = {{10.1088/2632-959X/abed3d}},
volume = {{2}},
year = {{2021}},
}