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Multi-beam X-ray ptychography using coded probes for rapid non-destructive high resolution imaging of extended samples

Lyubomirskiy, Mikhail ; Wittwer, Felix ; Kahnt, Maik LU orcid ; Koch, Frieder ; Kubec, Adam ; Falch, Ken Vidar ; Garrevoet, Jan ; Seyrich, Martin ; David, Christian and Schroer, Christian G. (2022) In Scientific Reports 12(1).
Abstract

Imaging large areas of a sample non-destructively and with high resolution is of great interest for both science and industry. For scanning coherent X-ray diffraction microscopy, i. e., ptychography, the achievable scan area at a given spatial resolution is limited by the coherent photon flux of modern X-ray sources. Multibeam X-ray ptychography can improve the scanning speed by scanning the sample with several parallel mutually incoherent beams, e. g., generated by illuminating multiple focusing optics in parallel by a partially coherent beam. The main difficulty with this scheme is the robust separation of the superimposed signals from the different beams, especially when the beams and the illuminated sample areas are quite similar.... (More)

Imaging large areas of a sample non-destructively and with high resolution is of great interest for both science and industry. For scanning coherent X-ray diffraction microscopy, i. e., ptychography, the achievable scan area at a given spatial resolution is limited by the coherent photon flux of modern X-ray sources. Multibeam X-ray ptychography can improve the scanning speed by scanning the sample with several parallel mutually incoherent beams, e. g., generated by illuminating multiple focusing optics in parallel by a partially coherent beam. The main difficulty with this scheme is the robust separation of the superimposed signals from the different beams, especially when the beams and the illuminated sample areas are quite similar. We overcome this difficulty by encoding each of the probing beams with its own X-ray phase plate. This helps the algorithm to robustly reconstruct the multibeam data. We compare the coded multibeam scans to uncoded multibeam and single beam scans, demonstrating the enhanced performance on a microchip sample with regular and repeating structures.

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author
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organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Scientific Reports
volume
12
issue
1
article number
6203
publisher
Nature Publishing Group
external identifiers
  • scopus:85128266643
  • pmid:35418587
ISSN
2045-2322
DOI
10.1038/s41598-022-09466-5
language
English
LU publication?
yes
additional info
Publisher Copyright: © 2022, The Author(s).
id
db985214-ff67-41ba-8c54-7bd517ca6bd8
date added to LUP
2022-05-01 14:12:58
date last changed
2024-06-09 13:20:28
@article{db985214-ff67-41ba-8c54-7bd517ca6bd8,
  abstract     = {{<p>Imaging large areas of a sample non-destructively and with high resolution is of great interest for both science and industry. For scanning coherent X-ray diffraction microscopy, i. e., ptychography, the achievable scan area at a given spatial resolution is limited by the coherent photon flux of modern X-ray sources. Multibeam X-ray ptychography can improve the scanning speed by scanning the sample with several parallel mutually incoherent beams, e. g., generated by illuminating multiple focusing optics in parallel by a partially coherent beam. The main difficulty with this scheme is the robust separation of the superimposed signals from the different beams, especially when the beams and the illuminated sample areas are quite similar. We overcome this difficulty by encoding each of the probing beams with its own X-ray phase plate. This helps the algorithm to robustly reconstruct the multibeam data. We compare the coded multibeam scans to uncoded multibeam and single beam scans, demonstrating the enhanced performance on a microchip sample with regular and repeating structures.</p>}},
  author       = {{Lyubomirskiy, Mikhail and Wittwer, Felix and Kahnt, Maik and Koch, Frieder and Kubec, Adam and Falch, Ken Vidar and Garrevoet, Jan and Seyrich, Martin and David, Christian and Schroer, Christian G.}},
  issn         = {{2045-2322}},
  language     = {{eng}},
  number       = {{1}},
  publisher    = {{Nature Publishing Group}},
  series       = {{Scientific Reports}},
  title        = {{Multi-beam X-ray ptychography using coded probes for rapid non-destructive high resolution imaging of extended samples}},
  url          = {{http://dx.doi.org/10.1038/s41598-022-09466-5}},
  doi          = {{10.1038/s41598-022-09466-5}},
  volume       = {{12}},
  year         = {{2022}},
}