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2005
Mark Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography
Ghatnekar-Nilsson, Sara ^LU ; Forsen, E ; Abadal, G ; Verd, J ; Campabadal, F ; Perez-Murano, F ; Esteve, J ; Barniol, N ; Boisen, A and Montelius, Lars ^LU (2005) In Nanotechnology 16(1). p.98-102
- Contribution to journal › Article
Mark Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry
Forsen, E ; Abadal, G ; Ghatnekar-Nilsson, Sara ^LU ; Teva, J ; Verd, J ; Sandberg, R ; Svendsen, W ; Perez-Murano, F ; Esteve, J and Figueras, E , et al. (2005) In Applied Physics Letters 87(4).
- Contribution to journal › Article
Mark Fully integrated nanoresonator system with attogram/Hz mass resolution
Forsén, E ; Abadal, G ; Nilsson, S G ; Verd, J ; Sandberg, R ; Svendsen, W ; Teva, J ; Pérez-Murano, F ; Esteve, J and Figueras, E , et al. (2005) 18th IEEE Intl Conf on Microelectromech Systems, Miami, Fl, USA (2005)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
2004
Mark Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist
Forsen, E ; Ghatnekar-Nilsson, Sara ^LU ; Carlberg, Patrick ^LU ; Abadal, G ; Perez-Murano, F ; Esteve, J ; Montserrat, J ; Figueras, E ; Campabadal, F and Verd, J , et al. (2004) In Nanotechnology 15(10). p.628-633
- Contribution to journal › Article
Mark Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist
Forsén, E ; Nilsson, S G ; Carlberg, Patrick ^LU ; Abadal, G ; Pérez-Murano, F ; Esteve, J ; Montserrat, J ; Figueras, E ; Campabadal, F and Verd, J , et al. (2004) Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding