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- 2004
-
Mark
Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
Whitlow, Harry J LU ; Ng, May Ling LU ; Auzelyte, Vaida LU ; Maximov, Ivan LU
; Montelius, Lars
LU
; van Kan, JA
; Bettiol, AA
and Watt, F
(2004)
In Nanotechnology
15(1).
p.223-226
- Contribution to journal › Article