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- 2004
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Mark
Dry release of suspended nanostructures
(
- Contribution to journal › Article
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Mark
Dry release of suspended nanostructures
2004) Micro Nano Engin, 2003(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist
2004) Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
-
Mark
Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist
(
- Contribution to journal › Article
- 2003
-
Mark
Fa-brication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes
(
- Contribution to journal › Article