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2005
Mark Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithography
Keil, M ; Beck, Marc ^LU ; Ling, T G I ; Graczyk, Mariusz ^LU ; Montelius, Lars ^LU and Heidari, B (2005) In Journal of Vacuum Science and Technology B 23(2). p.575-584
- Contribution to journal › Article
Mark An alignment procedure for nanoimprint lithography at the sub-20 nm level
Adolph, David ^LU ; Bolmsjö, E ; Theander, Elke ^LU ; Saers, R ; Graczyk, Mariusz ^LU ; Hessman, Dan ^LU ; Maximov, Ivan ^LU ; Andersson-Engels, Stefan ^LU ; Persson, Anders ^LU and Wahlström, Claes-Göran ^LU , et al. (2005) 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
2004
Mark Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
Keil, M ; Beck, Marc ^LU ; Frennesson, G ; Theander, E ; Bolmsjo, E ; Montelius, Lars ^LU and Heidari, B (2004) In Journal of Vacuum Science and Technology B 22(6). p.3283-3287
- Contribution to journal › Article
Mark Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
Keil, M ; Beck, Marc ^LU ; Frennesson, G ; Theander, Elke ^LU ; Bolmsjö, E ; Montelius, Lars ^LU and Heidari, B (2004) 48 th Intl Conf on Electron, Ion and Photon Beam Technol and Nanofabric, San Diego, Ca, USA (2004)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint - a tool for realizing nano-bio research
Carlberg, Patrick ^LU ; Johansson, F ; Mårtensson, Thomas ^LU ; Bunk, Richard ^LU ; Beck, Marc ^LU ; Persson, F ; Borgström, Magnus ^LU ; Nilsson, S G ; Heidari, B and Grazcyk, M , et al. (2004) 2004 4th IEEE Conference on Nanotechnology p.199-200
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
2002
Mark Nanoimprinted passive optical devices
Seekamp, J ; Zankovych, S ; Helfer, AH ; Maury, P ; Torres, CMS ; Bottger, G ; Liguda, C ; Eich, M ; Heidari, B and Montelius, Lars ^LU , et al. (2002) In Nanotechnology 13(5). p.581-586
- Contribution to journal › Article

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