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1997
Mark Nanometer table-top proximity x-ray lithography with liquid-target laser-plasma source
Malmqvist, L ; Bogdanov, A. L ; Montelius, Lars ^LU and Hertz, H. M (1997) In Journal of Vacuum Science and Technology B 15(4). p.814-817
- Contribution to journal › Article
Mark Liquid-target laser-plasma source for X-ray lithography
Malmqvist, L ; Bogdanov, A. L ; Montelius, Lars ^LU and Hertz, H. M (1997) In Microelectronic Engineering 35(1-4). p.535-536
- Contribution to journal › Article
1995
Mark Time-resolved Studies of Light-propagation In Paper
Carlsson, J ; Hellentin, P ; Malmqvist, L ; Persson, Anders ^LU ; Persson, W and Wahlström, Claes-Göran ^LU (1995) In Applied Optics 34(9). p.1528-1535
- Contribution to journal › Article