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2004
Mark Nanoimprint – a tool for realizing nano-bio research
Carlberg, Patrick ^LU ; Johansson, F ; Mårtensson, Thomas ^LU ; Beck, Marc ^LU ; Persson, F ; Nilsson, S G ; Bunk, R ; Borgström, Magnus ^LU ; Graszyk, M and Maximov, Ivan ^LU , et al. (2004) 8th International Conference on Nanometer-Scale Science and Technology, 2004
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
Keil, M ; Beck, Marc ^LU ; Frennesson, G ; Theander, Elke ^LU ; Bolmsjö, E ; Montelius, Lars ^LU and Heidari, B (2004) 48 th Intl Conf on Electron, Ion and Photon Beam Technol and Nanofabric, San Diego, Ca, USA (2004)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
2003
Mark Lift-off process for nanoimprint lithography
Carlberg, Patrick ^LU ; Graczyk, Mariusz ^LU ; Sarwe, Eva-Lena ^LU ; Maximov, Ivan ^LU ; Beck, Marc ^LU and Montelius, Lars ^LU (2003) 28th International Conference on Micro- and Nano-Engineering, 2002 67-8. p.203-207
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP
Maximov, Ivan ^LU ; Carlberg, Patrick ^LU ; Shorubalko, Ivan ^LU ; Wallin, Daniel ^LU ; Sarwe, Eva-Lena ^LU ; Beck, Marc ^LU ; Graczyk, Mariusz ^LU ; Seifert, Werner ^LU ; Xu, Hongqi ^LU and Montelius, Lars ^LU , et al. (2003) In Microelectronic Engineering 67-8. p.196-202
- Contribution to journal › Article
Mark Fluorescence microscopy for quality control in nanoimprint lithography
Finder, C ; Beck, Marc ^LU ; Seekamp, J ; Pfeiffer, K ; Carlberg, P ; Maximov, Ivan ^LU ; Reuther, F ; Sarwe, Eva-Lena ^LU ; Zankovich, S and Ahopelto, J , et al. (2003) 28th International Conference on Micro- and Nano-Engineering, 2002 67-8. p.623-628
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint-induced effects on electrical and optical properties of quantum well structures
Zankovych, S ; Maximov, I ; Shorubalko, Ivan ^LU ; Seekamp, J ; Beck, Marc ^LU ; Romanov, S ; Reuter, D ; Schafmeister, P ; Wieck, AD and Ahopelto, J , et al. (2003) 28th International Conference on Micro- and Nano-Engineering, 2002 67-8. p.214-220
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Fa-brication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes
Ling, TGI ; Beck, Marc ^LU ; Bunk, Richard ^LU ; Forsen, E ; Tegenfeldt, Jonas ^LU ; Zakharov, Alexei ^LU and Montelius, Lars ^LU (2003) In Microelectronic Engineering 67-8. p.887-892
- Contribution to journal › Article
Mark Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers
Beck, Marc ^LU (2003)
- Thesis › Doctoral thesis (compilation)
2002
Mark Polymer stamps for nanoimprinting
Pfeiffer, K ; Fink, M ; Ahrens, G ; Gruetzner, G ; Reuther, F ; Seekamp, J ; Zankovych, S ; Torres, CMS ; Maximov, Ivan ^LU and Beck, Marc ^LU , et al. (2002) In Microelectronic Engineering 61-2. p.393-398
- Contribution to journal › Article
Mark Improving stamps for 10 nm level wafer scale nanoimprint lithography
Beck, Marc ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU ; Sarwe, Eva-Lena ^LU ; Ling, TGI ; Keil, M and Montelius, Lars ^LU (2002) In Microelectronic Engineering 61-2. p.441-448
- Contribution to journal › Article

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