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2019
Mark Novel Lift-off Process for DUV Displacement Talbot Lithography
Graczyk, Mariusz ^LU ; Gomez, Victor ^LU ; Huffman, Maria ^LU and Maximov, Ivan ^LU (2019)
- Contribution to conference › Poster
2018
Mark High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching
Khan, Sabbir Ahmed ; Suyatin, Dmitry ^LU ; Sundqvist, Jonas ^LU ; Graczyk, Mariusz ^LU ; Junige, Marcel ; Kauppinen, Christoffer ; Kvennefors, Anders ^LU ; Huffman, Maria ^LU and Maximov, Ivan ^LU (2018) In ACS Applied Nano Materials p.2476-2482
- Contribution to journal › Article

your query:: Remove author: Maximov, Ivan (LU); Remove author: Huffman, Maria (LU)