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2002
Mark Fabrication of Si-based nanoimprint stamps with sub-20 nm features
Maximov, Ivan ^LU ; Sarwe, Eva-Lena ^LU ; Beck, Marc ^LU ; Deppert, Knut ^LU ; Graczyk, Mariusz ^LU ; Magnusson, Martin ^LU and Montelius, Lars ^LU (2002) Micro and Nano Engineering 2001 61-2. p.449-454
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Fabrication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes
Beck, Marc ^LU ; Bunk, Richard ^LU ; Forzen, E. ; Tegenfeldt, Jonas ^LU ; Ling, T.G.I. and Montelius, Lars ^LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding