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- 2003
-
Mark
Fluorescence microscopy for quality control in nanoimprint lithography
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
-
Mark
Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers
2003)(
- Thesis › Doctoral thesis (compilation)
- 2002
-
Mark
Improving stamps for 10 nm level wafer scale nanoimprint lithography
(
- Contribution to journal › Article