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Transition from smoothing to roughening of ion-eroded GaSb surfaces

Keller, A. ; Biermanns, A. ; Carbone, G. LU ; Grenzer, J. ; Facsko, S. ; Plantevin, O. ; Gago, R. and Metzger, T. H. (2009) In Applied Physics Letters 94(19).
Abstract

During ion sputtering of GaSb(100) surfaces a transient behavior from initial smoothing to roughening accompanied by self-organized pattern formation has been observed using in situ x-ray reflectivity and grazing incidence small angle scattering. The induced patterns show hexagonally ordered nanodot arrays with a spatial periodicity of 30 nm. The correlation length of the pattern increases with ion fluence. In the framework of the Bradley-Harper model [R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)], where the dot pattern formation results from an interplay of surface roughening due to sputtering and surface smoothing due to diffusion, the initial smoothing behavior is explained by the same surface diffusion... (More)

During ion sputtering of GaSb(100) surfaces a transient behavior from initial smoothing to roughening accompanied by self-organized pattern formation has been observed using in situ x-ray reflectivity and grazing incidence small angle scattering. The induced patterns show hexagonally ordered nanodot arrays with a spatial periodicity of 30 nm. The correlation length of the pattern increases with ion fluence. In the framework of the Bradley-Harper model [R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)], where the dot pattern formation results from an interplay of surface roughening due to sputtering and surface smoothing due to diffusion, the initial smoothing behavior is explained by the same surface diffusion processes as the pattern formation.

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publishing date
type
Contribution to journal
publication status
published
in
Applied Physics Letters
volume
94
issue
19
article number
193103
publisher
American Institute of Physics (AIP)
external identifiers
  • scopus:67049100726
ISSN
0003-6951
DOI
10.1063/1.3136765
language
English
LU publication?
no
id
8ae93395-66a3-4860-8bff-d07f56ea2505
date added to LUP
2021-12-15 11:57:23
date last changed
2022-03-19 05:34:12
@article{8ae93395-66a3-4860-8bff-d07f56ea2505,
  abstract     = {{<p>During ion sputtering of GaSb(100) surfaces a transient behavior from initial smoothing to roughening accompanied by self-organized pattern formation has been observed using in situ x-ray reflectivity and grazing incidence small angle scattering. The induced patterns show hexagonally ordered nanodot arrays with a spatial periodicity of 30 nm. The correlation length of the pattern increases with ion fluence. In the framework of the Bradley-Harper model [R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)], where the dot pattern formation results from an interplay of surface roughening due to sputtering and surface smoothing due to diffusion, the initial smoothing behavior is explained by the same surface diffusion processes as the pattern formation.</p>}},
  author       = {{Keller, A. and Biermanns, A. and Carbone, G. and Grenzer, J. and Facsko, S. and Plantevin, O. and Gago, R. and Metzger, T. H.}},
  issn         = {{0003-6951}},
  language     = {{eng}},
  number       = {{19}},
  publisher    = {{American Institute of Physics (AIP)}},
  series       = {{Applied Physics Letters}},
  title        = {{Transition from smoothing to roughening of ion-eroded GaSb surfaces}},
  url          = {{http://dx.doi.org/10.1063/1.3136765}},
  doi          = {{10.1063/1.3136765}},
  volume       = {{94}},
  year         = {{2009}},
}