Transition from smoothing to roughening of ion-eroded GaSb surfaces
(2009) In Applied Physics Letters 94(19).- Abstract
During ion sputtering of GaSb(100) surfaces a transient behavior from initial smoothing to roughening accompanied by self-organized pattern formation has been observed using in situ x-ray reflectivity and grazing incidence small angle scattering. The induced patterns show hexagonally ordered nanodot arrays with a spatial periodicity of 30 nm. The correlation length of the pattern increases with ion fluence. In the framework of the Bradley-Harper model [R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)], where the dot pattern formation results from an interplay of surface roughening due to sputtering and surface smoothing due to diffusion, the initial smoothing behavior is explained by the same surface diffusion... (More)
During ion sputtering of GaSb(100) surfaces a transient behavior from initial smoothing to roughening accompanied by self-organized pattern formation has been observed using in situ x-ray reflectivity and grazing incidence small angle scattering. The induced patterns show hexagonally ordered nanodot arrays with a spatial periodicity of 30 nm. The correlation length of the pattern increases with ion fluence. In the framework of the Bradley-Harper model [R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)], where the dot pattern formation results from an interplay of surface roughening due to sputtering and surface smoothing due to diffusion, the initial smoothing behavior is explained by the same surface diffusion processes as the pattern formation.
(Less)
- author
- Keller, A. ; Biermanns, A. ; Carbone, G. LU ; Grenzer, J. ; Facsko, S. ; Plantevin, O. ; Gago, R. and Metzger, T. H.
- publishing date
- 2009
- type
- Contribution to journal
- publication status
- published
- in
- Applied Physics Letters
- volume
- 94
- issue
- 19
- article number
- 193103
- publisher
- American Institute of Physics (AIP)
- external identifiers
-
- scopus:67049100726
- ISSN
- 0003-6951
- DOI
- 10.1063/1.3136765
- language
- English
- LU publication?
- no
- id
- 8ae93395-66a3-4860-8bff-d07f56ea2505
- date added to LUP
- 2021-12-15 11:57:23
- date last changed
- 2022-03-19 05:34:12
@article{8ae93395-66a3-4860-8bff-d07f56ea2505, abstract = {{<p>During ion sputtering of GaSb(100) surfaces a transient behavior from initial smoothing to roughening accompanied by self-organized pattern formation has been observed using in situ x-ray reflectivity and grazing incidence small angle scattering. The induced patterns show hexagonally ordered nanodot arrays with a spatial periodicity of 30 nm. The correlation length of the pattern increases with ion fluence. In the framework of the Bradley-Harper model [R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)], where the dot pattern formation results from an interplay of surface roughening due to sputtering and surface smoothing due to diffusion, the initial smoothing behavior is explained by the same surface diffusion processes as the pattern formation.</p>}}, author = {{Keller, A. and Biermanns, A. and Carbone, G. and Grenzer, J. and Facsko, S. and Plantevin, O. and Gago, R. and Metzger, T. H.}}, issn = {{0003-6951}}, language = {{eng}}, number = {{19}}, publisher = {{American Institute of Physics (AIP)}}, series = {{Applied Physics Letters}}, title = {{Transition from smoothing to roughening of ion-eroded GaSb surfaces}}, url = {{http://dx.doi.org/10.1063/1.3136765}}, doi = {{10.1063/1.3136765}}, volume = {{94}}, year = {{2009}}, }