Alexei Bogdanov (Former)

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2003
Mark Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production
Bogdanov, Alexei L. ^LU ; Holmqvist, Tommy ^LU ; Jedrasik, Piotr and Nilsson, Bengt ^LU (2003) In Microelectronic Engineering 67-68. p.381-389
- Contribution to journal › Article
2002
Mark Concept, construction and commissioning of an alignment system for deep X-ray lithography
Wilhelmi, O ; Peredkov, Serguei ^LU and Bogdanov, Alexei ^LU (2002) In Microelectronic Engineering 61-2. p.1107-1112
- Contribution to journal › Article

Publications

Open access (%)

Subjects

Physical Sciences (2)
Natural Sciences (1)

Frequent LU co-authors

Keywords

your query:: Remove author: Bogdanov, Alexei (LU)