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PtyNAMi : Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector

Schroer, Christian G. ; Seyrich, Martin ; Kahnt, Maik LU ; Botta, Stephan ; Döhrmann, Ralph ; Falkenberg, Gerald ; Garrevoet, Jan ; Lyubomirskiy, Mikhail ; Scholz, Maria and Schropp, Andreas , et al. (2017) X-Ray Nanoimaging: Instruments and Methods III 2017 10389.
Abstract

In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.

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publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
keywords
Interferometry, Nanopositioning, Ptychography, X-ray scanning microscopy
host publication
X-Ray Nanoimaging : Instruments and Methods III - Instruments and Methods III
editor
Somogyi, Andrea ; Lai, Barry ; and
volume
10389
article number
103890E
publisher
SPIE
conference name
X-Ray Nanoimaging: Instruments and Methods III 2017
conference location
San Diego, United States
conference dates
2017-08-07 - 2017-08-08
external identifiers
  • scopus:85034226731
ISBN
9781510612358
DOI
10.1117/12.2273710
language
English
LU publication?
no
id
0f80d95d-73d2-4efe-ab53-e1fafee55b2c
date added to LUP
2019-10-12 12:53:31
date last changed
2020-01-16 04:06:21
@inproceedings{0f80d95d-73d2-4efe-ab53-e1fafee55b2c,
  abstract     = {<p>In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.</p>},
  author       = {Schroer, Christian G. and Seyrich, Martin and Kahnt, Maik and Botta, Stephan and Döhrmann, Ralph and Falkenberg, Gerald and Garrevoet, Jan and Lyubomirskiy, Mikhail and Scholz, Maria and Schropp, Andreas and Wittwer, Felix},
  booktitle    = {X-Ray Nanoimaging : Instruments and Methods III},
  editor       = {Somogyi, Andrea and Lai, Barry},
  isbn         = {9781510612358},
  language     = {eng},
  month        = {01},
  publisher    = {SPIE},
  title        = {PtyNAMi : Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector},
  url          = {http://dx.doi.org/10.1117/12.2273710},
  doi          = {10.1117/12.2273710},
  volume       = {10389},
  year         = {2017},
}