PtyNAMi : Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector
(2017) X-Ray Nanoimaging: Instruments and Methods III 2017 10389.- Abstract
In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/0f80d95d-73d2-4efe-ab53-e1fafee55b2c
- author
- publishing date
- 2017-01-01
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- keywords
- Interferometry, Nanopositioning, Ptychography, X-ray scanning microscopy
- host publication
- X-Ray Nanoimaging : Instruments and Methods III - Instruments and Methods III
- editor
- Somogyi, Andrea and Lai, Barry
- volume
- 10389
- article number
- 103890E
- publisher
- SPIE
- conference name
- X-Ray Nanoimaging: Instruments and Methods III 2017
- conference location
- San Diego, United States
- conference dates
- 2017-08-07 - 2017-08-08
- external identifiers
-
- scopus:85034226731
- ISBN
- 9781510612358
- DOI
- 10.1117/12.2273710
- language
- English
- LU publication?
- no
- id
- 0f80d95d-73d2-4efe-ab53-e1fafee55b2c
- date added to LUP
- 2019-10-12 12:53:31
- date last changed
- 2023-12-04 02:31:27
@inproceedings{0f80d95d-73d2-4efe-ab53-e1fafee55b2c, abstract = {{<p>In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.</p>}}, author = {{Schroer, Christian G. and Seyrich, Martin and Kahnt, Maik and Botta, Stephan and Döhrmann, Ralph and Falkenberg, Gerald and Garrevoet, Jan and Lyubomirskiy, Mikhail and Scholz, Maria and Schropp, Andreas and Wittwer, Felix}}, booktitle = {{X-Ray Nanoimaging : Instruments and Methods III}}, editor = {{Somogyi, Andrea and Lai, Barry}}, isbn = {{9781510612358}}, keywords = {{Interferometry; Nanopositioning; Ptychography; X-ray scanning microscopy}}, language = {{eng}}, month = {{01}}, publisher = {{SPIE}}, title = {{PtyNAMi : Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector}}, url = {{http://dx.doi.org/10.1117/12.2273710}}, doi = {{10.1117/12.2273710}}, volume = {{10389}}, year = {{2017}}, }