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Low-Temperature Front-Side BEOL Technology with Circuit Level Multiline Thru-Reflect-Line Kit for III-V MOSFETs on Silicon

Andric, Stefan LU ; Ohlsson, Lars LU orcid and Wenrersson, Lars Erik LU (2019) 92nd ARFTG Microwave Measurement Conference, ARFTG 2019
Abstract

A multiline Thru-Reflect-Line (mTRL) calibration and parasitic pad removal kit is presented, intended for mm-wave III-V nanowire MOSFET characterization. Multiline TRL is implemented in a low-temperature BEOL process with substrate decoupled microstrip transmission lines. The transmission line characteristic impedance needed for accurate mTRL calibration is modelled. Simulated transmission line parameters show a good fit with measured transmission line data, including line characteristic impedance variation. Line loss less than 0.5 dB/mm up to 50 GHz is obtained. Finally, interconnect via section is calibrated and modelled, showing mTRL's ability to obtain small parasitic parameters.

Please use this url to cite or link to this publication:
author
; and
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
Back-End-Of-Line (BEOL), Benzocyclobutene (BCB), Microstrip Transmission Line, Nanowire MOSFET, On-wafer Calibration, Thru-Reflect-Line (TRL)
host publication
2019 92nd ARFTG Microwave Measurement Conference : Next Generation Microwave and Millimeter-Wave Measurement Techniques and Systems, ARFTG 2019 - Next Generation Microwave and Millimeter-Wave Measurement Techniques and Systems, ARFTG 2019
article number
8637222
publisher
IEEE - Institute of Electrical and Electronics Engineers Inc.
conference name
92nd ARFTG Microwave Measurement Conference, ARFTG 2019
conference location
Orlando, United States
conference dates
2019-01-21 - 2019-01-22
external identifiers
  • scopus:85063106716
ISBN
9781538665992
DOI
10.1109/ARFTG.2019.8637222
language
English
LU publication?
yes
additional info
Awarded ARFTG scholarship as selected student-applicant
id
1028e4e1-84b1-4bb1-874b-90122235d8e8
date added to LUP
2019-03-28 13:16:29
date last changed
2022-04-25 21:58:20
@inproceedings{1028e4e1-84b1-4bb1-874b-90122235d8e8,
  abstract     = {{<p>A multiline Thru-Reflect-Line (mTRL) calibration and parasitic pad removal kit is presented, intended for mm-wave III-V nanowire MOSFET characterization. Multiline TRL is implemented in a low-temperature BEOL process with substrate decoupled microstrip transmission lines. The transmission line characteristic impedance needed for accurate mTRL calibration is modelled. Simulated transmission line parameters show a good fit with measured transmission line data, including line characteristic impedance variation. Line loss less than 0.5 dB/mm up to 50 GHz is obtained. Finally, interconnect via section is calibrated and modelled, showing mTRL's ability to obtain small parasitic parameters.</p>}},
  author       = {{Andric, Stefan and Ohlsson, Lars and Wenrersson, Lars Erik}},
  booktitle    = {{2019 92nd ARFTG Microwave Measurement Conference : Next Generation Microwave and Millimeter-Wave Measurement Techniques and Systems, ARFTG 2019}},
  isbn         = {{9781538665992}},
  keywords     = {{Back-End-Of-Line (BEOL); Benzocyclobutene (BCB); Microstrip Transmission Line; Nanowire MOSFET; On-wafer Calibration; Thru-Reflect-Line (TRL)}},
  language     = {{eng}},
  month        = {{02}},
  publisher    = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}},
  title        = {{Low-Temperature Front-Side BEOL Technology with Circuit Level Multiline Thru-Reflect-Line Kit for III-V MOSFETs on Silicon}},
  url          = {{https://lup.lub.lu.se/search/files/64886046/92ARFTG_Stefan_Andric.pdf}},
  doi          = {{10.1109/ARFTG.2019.8637222}},
  year         = {{2019}},
}