Low-Temperature Front-Side BEOL Technology with Circuit Level Multiline Thru-Reflect-Line Kit for III-V MOSFETs on Silicon
(2019) 92nd ARFTG Microwave Measurement Conference, ARFTG 2019- Abstract
A multiline Thru-Reflect-Line (mTRL) calibration and parasitic pad removal kit is presented, intended for mm-wave III-V nanowire MOSFET characterization. Multiline TRL is implemented in a low-temperature BEOL process with substrate decoupled microstrip transmission lines. The transmission line characteristic impedance needed for accurate mTRL calibration is modelled. Simulated transmission line parameters show a good fit with measured transmission line data, including line characteristic impedance variation. Line loss less than 0.5 dB/mm up to 50 GHz is obtained. Finally, interconnect via section is calibrated and modelled, showing mTRL's ability to obtain small parasitic parameters.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/1028e4e1-84b1-4bb1-874b-90122235d8e8
- author
- Andric, Stefan LU ; Ohlsson, Lars LU and Wenrersson, Lars Erik LU
- organization
- publishing date
- 2019-02-07
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- keywords
- Back-End-Of-Line (BEOL), Benzocyclobutene (BCB), Microstrip Transmission Line, Nanowire MOSFET, On-wafer Calibration, Thru-Reflect-Line (TRL)
- host publication
- 2019 92nd ARFTG Microwave Measurement Conference : Next Generation Microwave and Millimeter-Wave Measurement Techniques and Systems, ARFTG 2019 - Next Generation Microwave and Millimeter-Wave Measurement Techniques and Systems, ARFTG 2019
- article number
- 8637222
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- conference name
- 92nd ARFTG Microwave Measurement Conference, ARFTG 2019
- conference location
- Orlando, United States
- conference dates
- 2019-01-21 - 2019-01-22
- external identifiers
-
- scopus:85063106716
- ISBN
- 9781538665992
- DOI
- 10.1109/ARFTG.2019.8637222
- language
- English
- LU publication?
- yes
- additional info
- Awarded ARFTG scholarship as selected student-applicant
- id
- 1028e4e1-84b1-4bb1-874b-90122235d8e8
- date added to LUP
- 2019-03-28 13:16:29
- date last changed
- 2022-04-25 21:58:20
@inproceedings{1028e4e1-84b1-4bb1-874b-90122235d8e8, abstract = {{<p>A multiline Thru-Reflect-Line (mTRL) calibration and parasitic pad removal kit is presented, intended for mm-wave III-V nanowire MOSFET characterization. Multiline TRL is implemented in a low-temperature BEOL process with substrate decoupled microstrip transmission lines. The transmission line characteristic impedance needed for accurate mTRL calibration is modelled. Simulated transmission line parameters show a good fit with measured transmission line data, including line characteristic impedance variation. Line loss less than 0.5 dB/mm up to 50 GHz is obtained. Finally, interconnect via section is calibrated and modelled, showing mTRL's ability to obtain small parasitic parameters.</p>}}, author = {{Andric, Stefan and Ohlsson, Lars and Wenrersson, Lars Erik}}, booktitle = {{2019 92nd ARFTG Microwave Measurement Conference : Next Generation Microwave and Millimeter-Wave Measurement Techniques and Systems, ARFTG 2019}}, isbn = {{9781538665992}}, keywords = {{Back-End-Of-Line (BEOL); Benzocyclobutene (BCB); Microstrip Transmission Line; Nanowire MOSFET; On-wafer Calibration; Thru-Reflect-Line (TRL)}}, language = {{eng}}, month = {{02}}, publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}}, title = {{Low-Temperature Front-Side BEOL Technology with Circuit Level Multiline Thru-Reflect-Line Kit for III-V MOSFETs on Silicon}}, url = {{https://lup.lub.lu.se/search/files/64886046/92ARFTG_Stefan_Andric.pdf}}, doi = {{10.1109/ARFTG.2019.8637222}}, year = {{2019}}, }