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Vertical oxide nanotubes connected by subsurface microchannels

Persson, Henrik LU ; Beech, Jason LU ; Samuelson, Lars LU ; Oredsson, Stina LU ; Prinz, Christelle LU and Tegenfeldt, Jonas LU (2012) In Nano Reseach 5(3). p.190-198
Abstract
We describe the fabrication of arrays of oxide nanotubes using a combination of bottom up and top down nanofabrication. The nanotubes are made from epitaxially grown semiconductor nanowires that are covered with an oxide layer using atomic layer deposition. The tips of the oxide-covered nanowires are removed by argon sputtering and the exposed semiconductor core is then selectively etched, leaving a hollow oxide tube. We show that it is possible to create fluidic connections to the nanotubes by a combination of electron beam lithography to precisely define the nanotube positions and controlled wet under-etching. DNA transport is demonstrated in the microchannel. Cells were successfully cultured on the nanotube arrays, demonstrating... (More)
We describe the fabrication of arrays of oxide nanotubes using a combination of bottom up and top down nanofabrication. The nanotubes are made from epitaxially grown semiconductor nanowires that are covered with an oxide layer using atomic layer deposition. The tips of the oxide-covered nanowires are removed by argon sputtering and the exposed semiconductor core is then selectively etched, leaving a hollow oxide tube. We show that it is possible to create fluidic connections to the nanotubes by a combination of electron beam lithography to precisely define the nanotube positions and controlled wet under-etching. DNA transport is demonstrated in the microchannel. Cells were successfully cultured on the nanotube arrays, demonstrating compatibility with cell-biological applications. Our device opens up the possibility of injecting molecules into cells with both spatial and temporal control. (Less)
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Nanotube, cell injection, nanowire, gallium phosphide, reactive ion, etching, wet etching, cell
in
Nano Reseach
volume
5
issue
3
pages
190 - 198
publisher
Springer
external identifiers
  • wos:000301794200006
  • scopus:84858283384
ISSN
1998-0124
DOI
10.1007/s12274-012-0199-0
language
English
LU publication?
yes
id
94c9f6ea-55aa-4ae6-9ddb-f42b55a8ce42 (old id 2494860)
date added to LUP
2012-05-10 14:09:46
date last changed
2017-01-01 04:01:41
@article{94c9f6ea-55aa-4ae6-9ddb-f42b55a8ce42,
  abstract     = {We describe the fabrication of arrays of oxide nanotubes using a combination of bottom up and top down nanofabrication. The nanotubes are made from epitaxially grown semiconductor nanowires that are covered with an oxide layer using atomic layer deposition. The tips of the oxide-covered nanowires are removed by argon sputtering and the exposed semiconductor core is then selectively etched, leaving a hollow oxide tube. We show that it is possible to create fluidic connections to the nanotubes by a combination of electron beam lithography to precisely define the nanotube positions and controlled wet under-etching. DNA transport is demonstrated in the microchannel. Cells were successfully cultured on the nanotube arrays, demonstrating compatibility with cell-biological applications. Our device opens up the possibility of injecting molecules into cells with both spatial and temporal control.},
  author       = {Persson, Henrik and Beech, Jason and Samuelson, Lars and Oredsson, Stina and Prinz, Christelle and Tegenfeldt, Jonas},
  issn         = {1998-0124},
  keyword      = {Nanotube,cell injection,nanowire,gallium phosphide,reactive ion,etching,wet etching,cell},
  language     = {eng},
  number       = {3},
  pages        = {190--198},
  publisher    = {Springer},
  series       = {Nano Reseach},
  title        = {Vertical oxide nanotubes connected by subsurface microchannels},
  url          = {http://dx.doi.org/10.1007/s12274-012-0199-0},
  volume       = {5},
  year         = {2012},
}