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Single suspended InGaAs nanowire MOSFETs

Zota, Cezar B. LU ; Wernersson, Lars Erik LU and Lind, Erik LU (2016) In Technical Digest - International Electron Devices Meeting, IEDM p.1-31
Abstract
© 2015 IEEE.We report on In0.s5Ga0.15As NWFETs utilizing a single suspended (above the substrate) selectively grown nanowire as the channel. These devices exhibit gm = 3.3 mS/μm and subthreshold slope SS = 118 mV/dec, both at VDs = 0.5 V and Lg = 60 nm. This is the highest reported value of gm for all MOSFETs and HEMTs, as well as a strong combination of on and off performance, with Q = gm/SS = 28, the highest for non-planar III-V MOSFETs.
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Technical Digest - International Electron Devices Meeting, IEDM
pages
1 - 31
publisher
Institute of Electrical and Electronics Engineers Inc.
external identifiers
  • scopus:84964049112
ISSN
0163-1918
DOI
10.1109/IEDM.2015.7409808
language
English
LU publication?
yes
id
3252ad66-746f-4eee-a981-743ef3b52a24
date added to LUP
2016-06-23 14:08:28
date last changed
2017-05-17 10:39:58
@article{3252ad66-746f-4eee-a981-743ef3b52a24,
  abstract     = {© 2015 IEEE.We report on In0.s5Ga0.15As NWFETs utilizing a single suspended (above the substrate) selectively grown nanowire as the channel. These devices exhibit gm = 3.3 mS/μm and subthreshold slope SS = 118 mV/dec, both at VDs = 0.5 V and Lg = 60 nm. This is the highest reported value of gm for all MOSFETs and HEMTs, as well as a strong combination of on and off performance, with Q = gm/SS = 28, the highest for non-planar III-V MOSFETs.},
  author       = {Zota, Cezar B. and Wernersson, Lars Erik and Lind, Erik},
  issn         = {0163-1918},
  language     = {eng},
  month        = {02},
  pages        = {1--31},
  publisher    = {Institute of Electrical and Electronics Engineers Inc.},
  series       = {Technical Digest - International Electron Devices Meeting, IEDM},
  title        = {Single suspended InGaAs nanowire MOSFETs},
  url          = {http://dx.doi.org/10.1109/IEDM.2015.7409808},
  year         = {2016},
}