Template-Assisted Selective Epitaxy of InAs on W
Svensson, Johannes LU ; Olausson, Patrik LU ; Menon, Heera LU ; Lind, Erik LU and Borg, Mattias LU
(2022)
2022 Compound Semiconductor Week, CSW 2022
- Abstract
Results on integration of InAs on W films through template assisted selective epitaxy are presented. The InAs crystals are analysed using SEM, electron beam backscattering and in-situ electrical measurements. A high yield of single crystalline InAs can be obtained for certain template diameters and pitches which demonstrates that this is a viable route to integrate III-V semiconductors in the back-end-of-line of CMOS circuits for added functionality.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/4150e39d-37b9-48ce-9d21-b066c4e28f5a
- author
- Svensson, Johannes
LU
; Olausson, Patrik
LU
; Menon, Heera
LU
; Lind, Erik
LU
and Borg, Mattias
LU
- organization
- publishing date
- 2022
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- host publication
- 2022 Compound Semiconductor Week, CSW 2022
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- conference name
- 2022 Compound Semiconductor Week, CSW 2022
- conference location
- Ann Arbor, United States
- conference dates
- 2022-06-01 - 2022-06-03
- external identifiers
-
- scopus:85142515565
- ISBN
- 9781665453400
- DOI
- 10.1109/CSW55288.2022.9930423
- project
- III-V Devices for Emerging Electronic Applications
- language
- English
- LU publication?
- yes
- id
- 4150e39d-37b9-48ce-9d21-b066c4e28f5a
- date added to LUP
- 2022-12-21 16:11:29
- date last changed
- 2024-01-18 16:58:10
@inproceedings{4150e39d-37b9-48ce-9d21-b066c4e28f5a,
abstract = {{<p>Results on integration of InAs on W films through template assisted selective epitaxy are presented. The InAs crystals are analysed using SEM, electron beam backscattering and in-situ electrical measurements. A high yield of single crystalline InAs can be obtained for certain template diameters and pitches which demonstrates that this is a viable route to integrate III-V semiconductors in the back-end-of-line of CMOS circuits for added functionality.</p>}},
author = {{Svensson, Johannes and Olausson, Patrik and Menon, Heera and Lind, Erik and Borg, Mattias}},
booktitle = {{2022 Compound Semiconductor Week, CSW 2022}},
isbn = {{9781665453400}},
language = {{eng}},
publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}},
title = {{Template-Assisted Selective Epitaxy of InAs on W}},
url = {{http://dx.doi.org/10.1109/CSW55288.2022.9930423}},
doi = {{10.1109/CSW55288.2022.9930423}},
year = {{2022}},
}