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FIB Plan and Side View Cross-Sectional TEM Sample Preparation of Nanostructures.

Lenrick, Filip LU ; Ek, Martin LU ; Jacobsson, Daniel LU ; Borgström, Magnus LU and Wallenberg, Reine LU (2014) In Microscopy and Microanalysis 20(1). p.133-140
Abstract
Focused ion beam is a powerful method for cross-sectional transmission electron microscope sample preparation due to being site specific and not limited to certain materials. It has, however, been difficult to apply to many nanostructured materials as they are prone to damage due to extending from the surface. Here we show methods for focused ion beam sample preparation for transmission electron microscopy analysis of such materials, demonstrated on GaAs-GaInP core shell nanowires. We use polymer resin as support and protection and are able to produce cross-sections both perpendicular to and parallel with the substrate surface with minimal damage. Consequently, nanowires grown perpendicular to the substrates could be imaged both in plan... (More)
Focused ion beam is a powerful method for cross-sectional transmission electron microscope sample preparation due to being site specific and not limited to certain materials. It has, however, been difficult to apply to many nanostructured materials as they are prone to damage due to extending from the surface. Here we show methods for focused ion beam sample preparation for transmission electron microscopy analysis of such materials, demonstrated on GaAs-GaInP core shell nanowires. We use polymer resin as support and protection and are able to produce cross-sections both perpendicular to and parallel with the substrate surface with minimal damage. Consequently, nanowires grown perpendicular to the substrates could be imaged both in plan and side view, including the nanowire-substrate interface in the latter case. Using the methods presented here we could analyze the faceting and homogeneity of hundreds of adjacent nanowires in a single lamella. (Less)
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Microscopy and Microanalysis
volume
20
issue
1
pages
133 - 140
publisher
Cambridge University Press
external identifiers
  • wos:000335378400017
  • pmid:24229472
  • scopus:84896485299
ISSN
1435-8115
DOI
10.1017/S1431927613013780
language
English
LU publication?
yes
id
308af863-2329-431a-973d-db009e0951e0 (old id 4179356)
date added to LUP
2013-12-10 16:59:01
date last changed
2017-01-01 04:01:52
@article{308af863-2329-431a-973d-db009e0951e0,
  abstract     = {Focused ion beam is a powerful method for cross-sectional transmission electron microscope sample preparation due to being site specific and not limited to certain materials. It has, however, been difficult to apply to many nanostructured materials as they are prone to damage due to extending from the surface. Here we show methods for focused ion beam sample preparation for transmission electron microscopy analysis of such materials, demonstrated on GaAs-GaInP core shell nanowires. We use polymer resin as support and protection and are able to produce cross-sections both perpendicular to and parallel with the substrate surface with minimal damage. Consequently, nanowires grown perpendicular to the substrates could be imaged both in plan and side view, including the nanowire-substrate interface in the latter case. Using the methods presented here we could analyze the faceting and homogeneity of hundreds of adjacent nanowires in a single lamella.},
  author       = {Lenrick, Filip and Ek, Martin and Jacobsson, Daniel and Borgström, Magnus and Wallenberg, Reine},
  issn         = {1435-8115},
  language     = {eng},
  number       = {1},
  pages        = {133--140},
  publisher    = {Cambridge University Press},
  series       = {Microscopy and Microanalysis},
  title        = {FIB Plan and Side View Cross-Sectional TEM Sample Preparation of Nanostructures.},
  url          = {http://dx.doi.org/10.1017/S1431927613013780},
  volume       = {20},
  year         = {2014},
}