Vertical oxide nanotubes connected by subsurface microchannels
Persson, Henrik LU ; Beech, Jason LU ; Samuelson, Lars LU ; Oredsson, Stina LU ; Prinz, Christelle LU and Tegenfeldt, Jonas LU
(2012)
In Nano Reseach
5(3).
p.190-198
- Abstract
- We describe the fabrication of arrays of oxide nanotubes using a combination of bottom up and top down nanofabrication. The nanotubes are made from epitaxially grown semiconductor nanowires that are covered with an oxide layer using atomic layer deposition. The tips of the oxide-covered nanowires are removed by argon sputtering and the exposed semiconductor core is then selectively etched, leaving a hollow oxide tube. We show that it is possible to create fluidic connections to the nanotubes by a combination of electron beam lithography to precisely define the nanotube positions and controlled wet under-etching. DNA transport is demonstrated in the microchannel. Cells were successfully cultured on the nanotube arrays, demonstrating... (More)
- We describe the fabrication of arrays of oxide nanotubes using a combination of bottom up and top down nanofabrication. The nanotubes are made from epitaxially grown semiconductor nanowires that are covered with an oxide layer using atomic layer deposition. The tips of the oxide-covered nanowires are removed by argon sputtering and the exposed semiconductor core is then selectively etched, leaving a hollow oxide tube. We show that it is possible to create fluidic connections to the nanotubes by a combination of electron beam lithography to precisely define the nanotube positions and controlled wet under-etching. DNA transport is demonstrated in the microchannel. Cells were successfully cultured on the nanotube arrays, demonstrating compatibility with cell-biological applications. Our device opens up the possibility of injecting molecules into cells with both spatial and temporal control. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/2494860
- author
- Persson, Henrik
LU
; Beech, Jason
LU
; Samuelson, Lars
LU
; Oredsson, Stina
LU
; Prinz, Christelle
LU
and Tegenfeldt, Jonas
LU
- organization
- publishing date
- 2012
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Nanotube, cell injection, nanowire, gallium phosphide, reactive ion, etching, wet etching, cell
- in
- Nano Reseach
- volume
- 5
- issue
- 3
- pages
- 190 - 198
- publisher
- Springer
- external identifiers
-
- wos:000301794200006
- scopus:84858283384
- ISSN
- 1998-0124
- DOI
- 10.1007/s12274-012-0199-0
- language
- English
- LU publication?
- yes
- id
- 94c9f6ea-55aa-4ae6-9ddb-f42b55a8ce42 (old id 2494860)
- date added to LUP
- 2016-04-01 10:56:26
- date last changed
- 2023-11-10 08:48:03
@article{94c9f6ea-55aa-4ae6-9ddb-f42b55a8ce42,
abstract = {{We describe the fabrication of arrays of oxide nanotubes using a combination of bottom up and top down nanofabrication. The nanotubes are made from epitaxially grown semiconductor nanowires that are covered with an oxide layer using atomic layer deposition. The tips of the oxide-covered nanowires are removed by argon sputtering and the exposed semiconductor core is then selectively etched, leaving a hollow oxide tube. We show that it is possible to create fluidic connections to the nanotubes by a combination of electron beam lithography to precisely define the nanotube positions and controlled wet under-etching. DNA transport is demonstrated in the microchannel. Cells were successfully cultured on the nanotube arrays, demonstrating compatibility with cell-biological applications. Our device opens up the possibility of injecting molecules into cells with both spatial and temporal control.}},
author = {{Persson, Henrik and Beech, Jason and Samuelson, Lars and Oredsson, Stina and Prinz, Christelle and Tegenfeldt, Jonas}},
issn = {{1998-0124}},
keywords = {{Nanotube; cell injection; nanowire; gallium phosphide; reactive ion; etching; wet etching; cell}},
language = {{eng}},
number = {{3}},
pages = {{190--198}},
publisher = {{Springer}},
series = {{Nano Reseach}},
title = {{Vertical oxide nanotubes connected by subsurface microchannels}},
url = {{http://dx.doi.org/10.1007/s12274-012-0199-0}},
doi = {{10.1007/s12274-012-0199-0}},
volume = {{5}},
year = {{2012}},
}