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Fast nanoscale imaging of strain in a multi-segment heterostructured nanowire with 2D Bragg ptychography

Hammarberg, Susanna LU ; Dzhigaev, Dmitry LU orcid ; Marçal, Lucas A.B. LU ; Dagyte, Vilgaile LU ; Björling, Alexander LU ; Borgström, Magnus T. LU orcid and Wallentina, Jesper (2024) In Journal of Applied Crystallography 57. p.60-70
Abstract

Developing semiconductor devices requires a fast and reliable source of strain information with high spatial resolution and strain sensitivity. This work investigates the strain in an axially heterostructured 180 nm-diameter GaInP nanowire with InP segments of varying lengths down to 9 nm, simultaneously probing both materials. Scanning X-ray diffraction (XRD) is compared with Bragg projection ptychography (BPP), a fast single-projection method. BPP offers a sufficient spatial resolution to reveal fine details within the largest segments, unlike scanning XRD. The spatial resolution affects the quantitative accuracy of the strain maps, where BPP shows much-improved agreement with an elastic 3D finite element model compared with scanning... (More)

Developing semiconductor devices requires a fast and reliable source of strain information with high spatial resolution and strain sensitivity. This work investigates the strain in an axially heterostructured 180 nm-diameter GaInP nanowire with InP segments of varying lengths down to 9 nm, simultaneously probing both materials. Scanning X-ray diffraction (XRD) is compared with Bragg projection ptychography (BPP), a fast single-projection method. BPP offers a sufficient spatial resolution to reveal fine details within the largest segments, unlike scanning XRD. The spatial resolution affects the quantitative accuracy of the strain maps, where BPP shows much-improved agreement with an elastic 3D finite element model compared with scanning XRD. The sensitivity of BPP to small deviations from the Bragg condition is systematically investigated. The experimental confirmation of the model suggests that the large lattice mismatch of 1.52% is accommodated without defects.

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author
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organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Bragg projection ptychography, III–V materials, nanowires, X-ray imaging
in
Journal of Applied Crystallography
volume
57
pages
11 pages
publisher
International Union of Crystallography
external identifiers
  • scopus:85184519442
  • pmid:38322717
ISSN
0021-8898
DOI
10.1107/S1600576723010403
language
English
LU publication?
yes
id
cf771b16-998c-443a-b40f-66772ef7558a
date added to LUP
2024-03-08 15:03:48
date last changed
2025-02-09 14:05:14
@article{cf771b16-998c-443a-b40f-66772ef7558a,
  abstract     = {{<p>Developing semiconductor devices requires a fast and reliable source of strain information with high spatial resolution and strain sensitivity. This work investigates the strain in an axially heterostructured 180 nm-diameter GaInP nanowire with InP segments of varying lengths down to 9 nm, simultaneously probing both materials. Scanning X-ray diffraction (XRD) is compared with Bragg projection ptychography (BPP), a fast single-projection method. BPP offers a sufficient spatial resolution to reveal fine details within the largest segments, unlike scanning XRD. The spatial resolution affects the quantitative accuracy of the strain maps, where BPP shows much-improved agreement with an elastic 3D finite element model compared with scanning XRD. The sensitivity of BPP to small deviations from the Bragg condition is systematically investigated. The experimental confirmation of the model suggests that the large lattice mismatch of 1.52% is accommodated without defects.</p>}},
  author       = {{Hammarberg, Susanna and Dzhigaev, Dmitry and Marçal, Lucas A.B. and Dagyte, Vilgaile and Björling, Alexander and Borgström, Magnus T. and Wallentina, Jesper}},
  issn         = {{0021-8898}},
  keywords     = {{Bragg projection ptychography; III–V materials; nanowires; X-ray imaging}},
  language     = {{eng}},
  pages        = {{60--70}},
  publisher    = {{International Union of Crystallography}},
  series       = {{Journal of Applied Crystallography}},
  title        = {{Fast nanoscale imaging of strain in a multi-segment heterostructured nanowire with 2D Bragg ptychography}},
  url          = {{http://dx.doi.org/10.1107/S1600576723010403}},
  doi          = {{10.1107/S1600576723010403}},
  volume       = {{57}},
  year         = {{2024}},
}