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- 2025
-
Mark
Surface effects in quasiatomic layer etching of silicon
Danielsson, Oscar ; Karimi, Amin ; Ilarionova, Yoana ; Garnæs, Jørgen ; Khan, Sabbir A. and Maximov, Ivan LU
(2025)
In Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
43(4).
- Contribution to journal › Article
- 2023
-
Mark
Damage Analysis of Reactive Ion and Quasi-Atomic Layer Etched Silicon
(2023) 23-rd International Conference on Atomic Layer Deposition
- Contribution to conference › Abstract
- 2018
-
Mark
High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching
Khan, Sabbir Ahmed ; Suyatin, Dmitry LU
; Sundqvist, Jonas
LU
; Graczyk, Mariusz
LU
; Junige, Marcel
; Kauppinen, Christoffer
; Kvennefors, Anders
LU
; Huffman, Maria
LU
and Maximov, Ivan
LU
(2018)
In ACS Applied Nano Materials
p.2476-2482
- Contribution to journal › Article
- 2017
-
Mark
Atomic layer etching of gallium nitride (0001)
Kauppinen, Christoffer ; Khan, Sabbir Ahmed ; Sundqvist, Jonas LU ; Suyatin, Dmitry B. LU
; Suihkonen, Sami
; Kauppinen, Esko I.
and Sopanen, Markku
(2017)
In Journal of Vacuum Science and Technology A
35(6).
- Contribution to journal › Article
- 2016
-
Mark
Evaluation of atomic layer etching possibility at Lund Nano Lab
(2016)
- Thesis › Master's thesis