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<iframe src="https://lup.lub.lu.se/search/publication?embed=1&q=author+exact+%22efdb8946-04ba-4d05-87a1-f60694af152f%22&amp;hide_pagination=1&amp;hide_info=1&amp;hide_options=1"
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2003
Mark Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production
Bogdanov, Alexei L. ^LU ; Holmqvist, Tommy ^LU ; Jedrasik, Piotr and Nilsson, Bengt ^LU (2003) In Microelectronic Engineering 67-68. p.381-389
- Contribution to journal › Article
2002
Mark Concept, construction and commissioning of an alignment system for deep X-ray lithography
Wilhelmi, O ; Peredkov, Serguei ^LU and Bogdanov, Alexei ^LU (2002) In Microelectronic Engineering 61-2. p.1107-1112
- Contribution to journal › Article