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- 2006
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Mark
Nanoimprint lithography for the fabrication of interdigitated cantilever arrays
(
- Contribution to journal › Article
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Mark
Nanoimprint and reactive etching for fabrication of Si/SiO2 NEMS structures
2006) 14th Intl Symp “Nanostructures: Physics and Technology”, 2006(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint-based fabrication and characterization of interdigitated cantilevver array
2006) International Conference on Nanoscience and Technology, 2006(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography
2006) Intl Conf on Nanoimprint and Nanoprint Technology, 2006(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2005
-
Mark
An alignment procedure for nanoimprint lithography at the sub-20 nm level
2005) 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding