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- 2005
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Mark
Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithography
(
- Contribution to journal › Article
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Mark
An alignment procedure for nanoimprint lithography at the sub-20 nm level
2005) 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2004
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Mark
Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
(
- Contribution to journal › Article
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Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
(
- Contribution to journal › Article
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Mark
Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
2004) 48 th Intl Conf on Electron, Ion and Photon Beam Technol and Nanofabric, San Diego, Ca, USA (2004)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
2004) Micro Nano Engin, 2003(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint - a tool for realizing nano-bio research
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- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint – a tool for realizing nano-bio research
2004) 8th International Conference on Nanometer-Scale Science and Technology, 2004(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2003
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Mark
Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP
(
- Contribution to journal › Article
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Mark
Lift-off process for nanoimprint lithography
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding