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- 2024
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Mark
Operando study of HfO2 atomic layer deposition on partially hydroxylated Si(111)
(
- Contribution to journal › Article
- 2023
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Mark
Time evolution of surface species during the ALD of high-k oxide on InAs
(
- Contribution to journal › Article
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Mark
Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO2
(
- Contribution to journal › Article