1 – 5 of 5
- show: 10
- |
- sort: year (new to old)
Close
Embed this list
<iframe src=""
width=""
height=""
allowtransparency="true"
frameborder="0">
</iframe>
- 2018
-
Mark
Nanoimprint stamps with ultra-high resolution : Optimal fabrication techniques
Graczyk, Mariusz LU ; Cattoni, Andrea ; Rösner, Benedikt ; Seniutinas, Gediminas ; Löfstrand, Anette LU ; Kvennefors, Anders LU ; Mailly, Dominique ; David, Christian and Maximov, Ivan LU
(2018)
In Microelectronic Engineering
190.
p.73-78
- Contribution to journal › Article
- 2007
-
Mark
Development of Nanoimprint Lithography for Applications in Electronics, Photonics and Life-sciences
(2007)
- Thesis › Doctoral thesis (compilation)
- 2003
-
Mark
Fluorescence microscopy for quality control in nanoimprint lithography
Finder, C ; Beck, Marc LU ; Seekamp, J ; Pfeiffer, K ; Carlberg, P ; Maximov, Ivan LU
; Reuther, F
; Sarwe, Eva-Lena
LU
; Zankovich, S
and Ahopelto, J
, et al.
(2003)
28th International Conference on Micro- and Nano-Engineering, 2002
67-8.
p.623-628
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
-
Mark
Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers
(2003)
- Thesis › Doctoral thesis (compilation)
- 2002
-
Mark
Improving stamps for 10 nm level wafer scale nanoimprint lithography
Beck, Marc LU ; Graczyk, Mariusz LU ; Maximov, Ivan LU
; Sarwe, Eva-Lena
LU
; Ling, TGI
; Keil, M
and Montelius, Lars
LU
(2002)
In Microelectronic Engineering
61-2.
p.441-448
- Contribution to journal › Article