Aerotaxy: High throughput gas-phase epitaxy of nanostructures
(2020) European Aerosol Conference 2020- Abstract
- Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and... (More)
- Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/26ac832e-d5ee-40e3-8731-b2b0b4832835
- author
- Deppert, Knut LU ; Sivakumar, Sudhakar LU ; Persson, Axel LU ; Metaferia, Wondwosen LU ; Wallenberg, Reine LU ; Heurlin, Magnus LU ; Samuelson, Lars LU ; Johansson, Jonas LU and Magnusson, Martin H. LU
- organization
- publishing date
- 2020-08-31
- type
- Contribution to conference
- publication status
- published
- subject
- conference name
- European Aerosol Conference 2020
- conference location
- Aachen, Germany
- conference dates
- 2020-08-31 - 2020-09-04
- language
- Swedish
- LU publication?
- yes
- id
- 26ac832e-d5ee-40e3-8731-b2b0b4832835
- date added to LUP
- 2020-11-30 09:50:24
- date last changed
- 2023-02-22 11:19:24
@misc{26ac832e-d5ee-40e3-8731-b2b0b4832835, abstract = {{Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale.}}, author = {{Deppert, Knut and Sivakumar, Sudhakar and Persson, Axel and Metaferia, Wondwosen and Wallenberg, Reine and Heurlin, Magnus and Samuelson, Lars and Johansson, Jonas and Magnusson, Martin H.}}, language = {{swe}}, month = {{08}}, title = {{Aerotaxy: High throughput gas-phase epitaxy of nanostructures}}, year = {{2020}}, }