Reduction of the barrier height and enhancement of tunneling current of titanium contacts using embedded Au nano-particles on 4H and 6H silicon carbide
(2002) In Materials Science Forum 389-3(2). p.937-940- Abstract
- We have investigated the electrical characteristics of Ti Schottky contacts with embedded Au nano-particles on various types of epilayers of SiC (4H- and 6H-SiC). From our current-voltage (I-V) and capacitance-voltage (C-V) measurements, we observed that Ti Schottky contacts with embedded Au nano-particles had 0.19 eV (n-4H-SiC) and 0.15 eV (n-6H-SiC) lower barrier height than those of particle free Ti Schottky contacts. In order to understand this reduction of the Schottky barrier height (SBH) for Ti Schottky contacts with embedded Au nano-particles, it has been proposed that SBH lowering is caused by an enhanced electric field due to the small size of the Au nano-particles and the large SBH difference. We have also tested these contacts... (More)
- We have investigated the electrical characteristics of Ti Schottky contacts with embedded Au nano-particles on various types of epilayers of SiC (4H- and 6H-SiC). From our current-voltage (I-V) and capacitance-voltage (C-V) measurements, we observed that Ti Schottky contacts with embedded Au nano-particles had 0.19 eV (n-4H-SiC) and 0.15 eV (n-6H-SiC) lower barrier height than those of particle free Ti Schottky contacts. In order to understand this reduction of the Schottky barrier height (SBH) for Ti Schottky contacts with embedded Au nano-particles, it has been proposed that SBH lowering is caused by an enhanced electric field due to the small size of the Au nano-particles and the large SBH difference. We have also tested these contacts on highly doped nand p-type SiC material to study ohmic contacts using linear TLM measurements. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/331230
- author
- Lee, SK ; Zetterling, CM ; Ostling, M ; Aberg, I ; Magnusson, Martin LU ; Deppert, Knut LU ; Wernersson, Lars-Erik LU ; Samuelson, Lars LU and Litwin, A
- organization
- publishing date
- 2002
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Schottky, ohmic contacts, nanoparticles, aerosol, SiC, contacts, image force lowering
- in
- Materials Science Forum
- volume
- 389-3
- issue
- 2
- pages
- 937 - 940
- publisher
- Trans Tech Publications
- external identifiers
-
- wos:000177321100226
- scopus:0036432228
- ISSN
- 0255-5476
- language
- English
- LU publication?
- yes
- id
- 04bb54d4-3191-413e-ae51-8019bd27b254 (old id 331230)
- date added to LUP
- 2016-04-01 16:33:48
- date last changed
- 2022-02-12 23:02:01
@article{04bb54d4-3191-413e-ae51-8019bd27b254, abstract = {{We have investigated the electrical characteristics of Ti Schottky contacts with embedded Au nano-particles on various types of epilayers of SiC (4H- and 6H-SiC). From our current-voltage (I-V) and capacitance-voltage (C-V) measurements, we observed that Ti Schottky contacts with embedded Au nano-particles had 0.19 eV (n-4H-SiC) and 0.15 eV (n-6H-SiC) lower barrier height than those of particle free Ti Schottky contacts. In order to understand this reduction of the Schottky barrier height (SBH) for Ti Schottky contacts with embedded Au nano-particles, it has been proposed that SBH lowering is caused by an enhanced electric field due to the small size of the Au nano-particles and the large SBH difference. We have also tested these contacts on highly doped nand p-type SiC material to study ohmic contacts using linear TLM measurements.}}, author = {{Lee, SK and Zetterling, CM and Ostling, M and Aberg, I and Magnusson, Martin and Deppert, Knut and Wernersson, Lars-Erik and Samuelson, Lars and Litwin, A}}, issn = {{0255-5476}}, keywords = {{Schottky; ohmic contacts; nanoparticles; aerosol; SiC; contacts; image force lowering}}, language = {{eng}}, number = {{2}}, pages = {{937--940}}, publisher = {{Trans Tech Publications}}, series = {{Materials Science Forum}}, title = {{Reduction of the barrier height and enhancement of tunneling current of titanium contacts using embedded Au nano-particles on 4H and 6H silicon carbide}}, volume = {{389-3}}, year = {{2002}}, }