Ivan Maximov

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2002
Mark Fabrication of Si-based nanoimprint stamps with sub-20 nm features
Maximov, Ivan ^LU ; Sarwe, Eva-Lena ^LU ; Beck, Marc ^LU ; Deppert, Knut ^LU ; Graczyk, Mariusz ^LU ; Magnusson, Martin ^LU and Montelius, Lars ^LU (2002) Micro and Nano Engineering 2001 61-2. p.449-454
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint in mr-L 6000.1 XP/PMMA resist system
Carlberg, Patrick ^LU ; Beck, Marc ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU ; Sarwe, Eva-Lena ^LU ; Montelius, Lars ^LU ; Pfeiffer, K. ; Reuther, F. and Gruetzner, G. (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Next generation nanotechnologies for sensor array fabrication
Montelius, Lars ^LU ; Beck, Marc ^LU ; Ling, T. ; Carlberg, Patrick ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU and Sarwe, Eva-Lena ^LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark New high resolution negative resist mr-L 6000.1 XP for electron beam and nanoimprint lithography
Maximov, Ivan ^LU ; Beck, Marc ^LU ; Carlberg, Patrick ^LU ; Montelius, Lars ^LU ; Pfeiffer, K. ; Reuther, F. ; Gruetzer, G. ; Schulz, H. ; Wissen, M. and Scheer, H.-C. (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Three-terminal ballistic junctions: new building blocks for functional devices in nanoelectronics
Xu, Hongqi ^LU ; Shorubalko, Ivan ^LU ; Maximov, Ivan ^LU ; Seifert, Werner ^LU ; Omling, Pär ^LU and Samuelson, Lars ^LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Quantative photoelectron spectromicroscopy for investigation of PMMA resist residues
Zakharov, Alexei ^LU ; Maximov, Ivan ^LU ; Holmqvist, T. ; Montelius, Lars ^LU and Lindau, Ingolf ^LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark A novel frequency-doubling device based on three-terminal ballistic junction
Shorubalko, Ivan ^LU ; Xu, Hongqi ^LU ; Maximov, Ivan ^LU ; Nilsson, D. ; Omling, Pär ^LU ; Samuelson, Lars ^LU and Seifert, Werner ^LU (2002) Device Research Conference, 2002 p.159-160
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark A novel device principle for nanoelectronics
Xu, Hongqi ^LU ; Shorubalko, Ivan ^LU ; Maximov, Ivan ^LU ; Seifert, Werner ^LU ; Omling, Pär ^LU and Samuelson, Lars ^LU (2002) In Materials Science and Engineering C: Materials for Biological Applications 19(1-2). p.417-420
- Contribution to journal › Article
Mark Investigation of PMMA resist residues using photoelectron microscopy
Maximov, Ivan ^LU ; Zakharov, Alexei ^LU ; Holmqvist, T. ; Montelius, Lars ^LU and Lindau, Ingolf ^LU (2002) In Journal of Vacuum Science and Technology B20(3). p.1139-1142
- Contribution to journal › Article
1997
Mark Fabrication of Low-Dimensional Structures in III-V Semiconductors
Maximov, Ivan ^LU (1997)
- Thesis › Doctoral thesis (compilation)

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