Lars Montelius
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- 2004
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Mark
Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist
2004) Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Fabrication and AFM-characterization of nanocantilevers to be used as mass sensors
2004) 1st Workshop on Nanomechan Sensors, Madrid, Spain (2004)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
2004) 48 th Intl Conf on Electron, Ion and Photon Beam Technol and Nanofabric, San Diego, Ca, USA (2004)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
2004) Micro Nano Engin, 2003(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Dry release of suspended nanostructures
2004) Micro Nano Engin, 2003(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanowire arrays - a toolbox for the future
2004) 8th International Conference on Nanometer-Scale Science and Technology, 2004(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2003
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Mark
Lift-off process for nanoimprint lithography
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP
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- Contribution to journal › Article
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Mark
Towards a 'nano-traffic' system powered by molecular motors
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- Contribution to journal › Article
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Mark
A comparison of thermally and photochemically cross-linked polymers for nanoimprinting
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- Contribution to journal › Article