Lars Montelius
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- 2005
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Mark
Guiding motor-propelled molecules with nanoscale precision through silanized bi-channel structures
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- Contribution to journal › Article
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Mark
An alignment procedure for nanoimprint lithography at the sub-20 nm level
2005) 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Fully integrated nanoresonator system with attogram/Hz mass resolution
2005) 18th IEEE Intl Conf on Microelectromech Systems, Miami, Fl, USA (2005)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
The use of nanoimprint lithography for creation of biomaterial surfaces and structures
2005) MRS (Materials Research Society) Fall Meeting & Exhibit, 2005(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2004
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Mark
Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping
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- Contribution to journal › Article
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Mark
Size effect on Young's modulus of thin chromium cantilevers
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- Contribution to journal › Article
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Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
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- Contribution to journal › Article
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Mark
Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
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- Contribution to journal › Article
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Mark
Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist
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- Contribution to journal › Article
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Mark
Nanowire arrays defined by nanoimprint lithography
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- Contribution to journal › Article