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Aerotaxy: High throughput gas-phase epitaxy of nanostructures

Deppert, Knut LU orcid ; Sivakumar, Sudhakar LU ; Persson, Axel LU orcid ; Metaferia, Wondwosen LU ; Wallenberg, Reine LU ; Heurlin, Magnus LU ; Samuelson, Lars LU ; Johansson, Jonas LU orcid and Magnusson, Martin H. LU (2020) European Aerosol Conference 2020
Abstract
Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and... (More)
Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale. (Less)
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organization
publishing date
type
Contribution to conference
publication status
published
subject
conference name
European Aerosol Conference 2020
conference location
Aachen, Germany
conference dates
2020-08-31 - 2020-09-04
language
Swedish
LU publication?
yes
id
26ac832e-d5ee-40e3-8731-b2b0b4832835
date added to LUP
2020-11-30 09:50:24
date last changed
2023-02-22 11:19:24
@misc{26ac832e-d5ee-40e3-8731-b2b0b4832835,
  abstract     = {{Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale.}},
  author       = {{Deppert, Knut and Sivakumar, Sudhakar and Persson, Axel and Metaferia, Wondwosen and Wallenberg, Reine and Heurlin, Magnus and Samuelson, Lars and Johansson, Jonas and Magnusson, Martin H.}},
  language     = {{swe}},
  month        = {{08}},
  title        = {{Aerotaxy: High throughput gas-phase epitaxy of nanostructures}},
  year         = {{2020}},
}