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Integration of Ferroelectric HfO2 onto a III-V Nanowire Platform

Persson, Anton E. O. LU orcid (2023) In Licentiate and Doctoral Theses 156(156).
Abstract
The discovery of ferroelectricity in CMOS-compatible oxides, such as doped hafnium oxide, has opened new possibilities for electronics by reviving the use of ferroelectric implementations on modern technology platforms. This thesis presents the ground-up integration of ferroelectric HfO2 on a thermally sensitive III-V nanowire platform leading to the successful implementation of ferroelectric transistors (FeFETs), tunnel junctions (FTJs), and varactors for mm-wave applications. As ferroelectric HfO2 on III-V semiconductors is a nascent technology, a special emphasis is put on the fundamental integration issues and the various engineering challenges facing the technology.

The fabrication of... (More)
The discovery of ferroelectricity in CMOS-compatible oxides, such as doped hafnium oxide, has opened new possibilities for electronics by reviving the use of ferroelectric implementations on modern technology platforms. This thesis presents the ground-up integration of ferroelectric HfO2 on a thermally sensitive III-V nanowire platform leading to the successful implementation of ferroelectric transistors (FeFETs), tunnel junctions (FTJs), and varactors for mm-wave applications. As ferroelectric HfO2 on III-V semiconductors is a nascent technology, a special emphasis is put on the fundamental integration issues and the various engineering challenges facing the technology.

The fabrication of metal-oxide-semiconductor (MOS) capacitors is treated as well as the measurement methods developed to investigate the interfacial quality to the narrow bandgap III-V materials using both electrical and operando synchrotron light source techniques. After optimizing both the films and the top electrode, the gate stack is integrated onto vertical InAs nanowires on Si in order to successfully implement FeFETs. Their performance and reliability can be explained from the deeper physical understanding obtained from the capacitor structures.

By introducing an InAs/(In)GaAsSb/GaSb heterostructure in the nanowire, a ferroelectric tunnel field effect transistor (ferro-TFET) is fabricated. Based on the ultra-short effective channel created by the band-to-band tunneling process, the localized potential variations induced by single ultra-scaled ferroelectric domains and individual defects are sensed and investigated. By intentionally introducing a gate-source overlap in the ferro-TFET, a non-volatile reconfigurable single-transistor solution for modulating an input signal with diverse modes including signal transmission, phase shift, frequency doubling, and mixing is implemented.

Finally, by fabricating scaled ferroelectric MOS capacitors in the front-end with a dedicated and adopted RF and mm-wave backend-of-line (BEOL) implementation, the ferroelectric behavior is captured at RF and mm-wave frequencies. (Less)
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author
supervisor
opponent
  • Prof. Mikolajick, Thomas, Technical University Dresden, Germany.
organization
publishing date
type
Thesis
publication status
published
subject
keywords
ferroelectricity, ferroelectric FET, ferroelectric tunnel junction, tunnel field effect transistors, HZO, III-V, nanowire
in
Licentiate and Doctoral Theses
volume
156
issue
156
pages
240 pages
publisher
Department of Electrical and Information Technology, Lund University
defense location
Lecture Hall E:1406, building E, Ole Römers väg 3, Faculty of Engineering LTH, Lund University, Lund. The dissertation will be live streamed, but part of the premises is to be excluded from the live stream.
defense date
2023-05-12 09:15:00
ISSN
1654-790X
1654-790X
ISBN
978-91-8039-674-5
978-91-8039-673-8
language
English
LU publication?
yes
id
3a50dadb-84af-4430-b1e9-db6ffea7d02e
date added to LUP
2023-04-17 10:13:42
date last changed
2023-04-19 09:41:52
@phdthesis{3a50dadb-84af-4430-b1e9-db6ffea7d02e,
  abstract     = {{The discovery of ferroelectricity in CMOS-compatible oxides, such as doped hafnium oxide, has opened new possibilities for electronics by reviving the use of ferroelectric implementations on modern technology platforms. This thesis presents the ground-up integration of ferroelectric HfO<sub>2</sub> on a thermally sensitive III-V nanowire platform leading to the successful implementation of ferroelectric transistors (FeFETs), tunnel junctions (FTJs), and varactors for mm-wave applications. As ferroelectric HfO<sub>2</sub> on III-V semiconductors is a nascent technology, a special emphasis is put on the fundamental integration issues and the various engineering challenges facing the technology.<br/><br/>The fabrication of metal-oxide-semiconductor (MOS) capacitors is treated as well as the measurement methods developed to investigate the interfacial quality to the narrow bandgap III-V materials using both electrical and operando synchrotron light source techniques. After optimizing both the films and the top electrode, the gate stack is integrated onto vertical InAs nanowires on Si in order to successfully implement FeFETs. Their performance and reliability can be explained from the deeper physical understanding obtained from the capacitor structures.<br/><br/>By introducing an InAs/(In)GaAsSb/GaSb heterostructure in the nanowire, a ferroelectric tunnel field effect transistor (ferro-TFET) is fabricated. Based on the ultra-short effective channel created by the band-to-band tunneling process, the localized potential variations induced by single ultra-scaled ferroelectric domains and individual defects are sensed and investigated. By intentionally introducing a gate-source overlap in the ferro-TFET, a non-volatile reconfigurable single-transistor solution for modulating an input signal with diverse modes including signal transmission, phase shift, frequency doubling, and mixing is implemented.<br/><br/>Finally, by fabricating scaled ferroelectric MOS capacitors in the front-end with a dedicated and adopted RF and mm-wave backend-of-line (BEOL) implementation, the ferroelectric behavior is captured at RF and mm-wave frequencies.}},
  author       = {{Persson, Anton E. O.}},
  isbn         = {{978-91-8039-674-5}},
  issn         = {{1654-790X}},
  keywords     = {{ferroelectricity; ferroelectric FET; ferroelectric tunnel junction; tunnel field effect transistors; HZO; III-V; nanowire}},
  language     = {{eng}},
  number       = {{156}},
  publisher    = {{Department of Electrical and Information Technology, Lund University}},
  school       = {{Lund University}},
  series       = {{Licentiate and Doctoral Theses}},
  title        = {{Integration of Ferroelectric HfO<sub>2</sub> onto a III-V Nanowire Platform}},
  url          = {{https://lup.lub.lu.se/search/files/144384068/PhD_Thesis_Anton_Persson_online.pdf}},
  volume       = {{156}},
  year         = {{2023}},
}