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Simulating Scaling Effects in Fully Vertical GaN FinFETs

Simko, Alexander ; Garigapati, Navya Sri LU ; Logotheti, Adamantia LU orcid ; Darakchieva, Vanya LU and Lind, Erik LU orcid (2025) In Physica Status Solidi (A) Applications and Materials Science
Abstract

Herein, it is shown that a fully vertical GaN FinFET can reach close to ideal Baliga's figure of merit (BFOM) for thicker drift layers. Devices with drift layers between 1 and 8 (Formula presented.) are simulated using TCAD, and the device geometry is varied to find optimal device performance. For 8 (Formula presented.) drift layers, device operation at the BFOM limit is found with (Formula presented.) and (Formula presented.). An optimal switching FOM at (Formula presented.) is found.

Please use this url to cite or link to this publication:
author
; ; ; and
organization
publishing date
type
Contribution to journal
publication status
epub
subject
keywords
finFETs, GaN, power devices, TCAD
in
Physica Status Solidi (A) Applications and Materials Science
publisher
Wiley-VCH Verlag
external identifiers
  • scopus:105007928041
ISSN
1862-6300
DOI
10.1002/pssa.202500050
language
English
LU publication?
yes
additional info
Publisher Copyright: © 2025 The Author(s). physica status solidi (a) applications and materials science published by Wiley-VCH GmbH.
id
a33b27ec-6615-4c9f-abb7-538c45ffc722
date added to LUP
2025-11-06 16:31:18
date last changed
2025-11-10 16:10:27
@article{a33b27ec-6615-4c9f-abb7-538c45ffc722,
  abstract     = {{<p>Herein, it is shown that a fully vertical GaN FinFET can reach close to ideal Baliga's figure of merit (BFOM) for thicker drift layers. Devices with drift layers between 1 and 8 (Formula presented.) are simulated using TCAD, and the device geometry is varied to find optimal device performance. For 8 (Formula presented.) drift layers, device operation at the BFOM limit is found with (Formula presented.) and (Formula presented.). An optimal switching FOM at (Formula presented.) is found.</p>}},
  author       = {{Simko, Alexander and Garigapati, Navya Sri and Logotheti, Adamantia and Darakchieva, Vanya and Lind, Erik}},
  issn         = {{1862-6300}},
  keywords     = {{finFETs; GaN; power devices; TCAD}},
  language     = {{eng}},
  publisher    = {{Wiley-VCH Verlag}},
  series       = {{Physica Status Solidi (A) Applications and Materials Science}},
  title        = {{Simulating Scaling Effects in Fully Vertical GaN FinFETs}},
  url          = {{http://dx.doi.org/10.1002/pssa.202500050}},
  doi          = {{10.1002/pssa.202500050}},
  year         = {{2025}},
}