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Realization of Ultrahigh Quality InGaN Platelets to be Used as Relaxed Templates for Red Micro-LEDs

Bi, Zhaoxia LU orcid ; Lu, Taiping LU ; Colvin, Jovana LU ; Sjögren, Elis LU orcid ; Vainorius, Neimantas LU ; Gustafsson, Anders LU orcid ; Johansson, Jonas LU orcid ; Timm, Rainer LU orcid ; Lenrick, Filip LU orcid and Wallenberg, Reine LU , et al. (2020) In ACS Applied Materials and Interfaces 12(15). p.17845-17851
Abstract

In this work, arrays of predominantly relaxed InGaN platelets with indium contents of up to 18%, free from dislocations and offering a smooth top c-plane, are presented. The InGaN platelets are grown by metal-organic vapor phase epitaxy on a dome-like InGaN surface formed by chemical mechanical polishing of InGaN pyramids defined by 6 equivalent {101¯ 1} planes. The dome-like surface is flattened during growth, through the formation of bunched steps, which are terminated when reaching the inclined {101¯ 1} planes. The continued growth takes place on the flattened top c-plane with single bilayer surface steps initiated at the six corners between the c-plane and the inclined {101¯ 1} planes, leading to the... (More)

In this work, arrays of predominantly relaxed InGaN platelets with indium contents of up to 18%, free from dislocations and offering a smooth top c-plane, are presented. The InGaN platelets are grown by metal-organic vapor phase epitaxy on a dome-like InGaN surface formed by chemical mechanical polishing of InGaN pyramids defined by 6 equivalent {101¯ 1} planes. The dome-like surface is flattened during growth, through the formation of bunched steps, which are terminated when reaching the inclined {101¯ 1} planes. The continued growth takes place on the flattened top c-plane with single bilayer surface steps initiated at the six corners between the c-plane and the inclined {101¯ 1} planes, leading to the formation of high-quality InGaN layers. The top c-plane of the as-formed InGaN platelets can be used as a high-quality template for red micro light-emitting diodes.

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organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
chemical mechanical polishing, InGaN, micro-LEDs, selective area growth, template, vapor phase epitaxy
in
ACS Applied Materials and Interfaces
volume
12
issue
15
pages
7 pages
publisher
The American Chemical Society (ACS)
external identifiers
  • scopus:85083544214
  • pmid:32207292
ISSN
1944-8244
DOI
10.1021/acsami.0c00951
language
English
LU publication?
yes
id
b8326caf-9dee-455a-a44b-464284ca375f
date added to LUP
2021-01-12 13:56:25
date last changed
2024-06-13 04:32:14
@article{b8326caf-9dee-455a-a44b-464284ca375f,
  abstract     = {{<p>In this work, arrays of predominantly relaxed InGaN platelets with indium contents of up to 18%, free from dislocations and offering a smooth top c-plane, are presented. The InGaN platelets are grown by metal-organic vapor phase epitaxy on a dome-like InGaN surface formed by chemical mechanical polishing of InGaN pyramids defined by 6 equivalent {101&amp;macr; 1} planes. The dome-like surface is flattened during growth, through the formation of bunched steps, which are terminated when reaching the inclined {101&amp;macr; 1} planes. The continued growth takes place on the flattened top c-plane with single bilayer surface steps initiated at the six corners between the c-plane and the inclined {101&amp;macr; 1} planes, leading to the formation of high-quality InGaN layers. The top c-plane of the as-formed InGaN platelets can be used as a high-quality template for red micro light-emitting diodes.</p>}},
  author       = {{Bi, Zhaoxia and Lu, Taiping and Colvin, Jovana and Sjögren, Elis and Vainorius, Neimantas and Gustafsson, Anders and Johansson, Jonas and Timm, Rainer and Lenrick, Filip and Wallenberg, Reine and Monemar, Bo and Samuelson, Lars}},
  issn         = {{1944-8244}},
  keywords     = {{chemical mechanical polishing; InGaN; micro-LEDs; selective area growth; template; vapor phase epitaxy}},
  language     = {{eng}},
  number       = {{15}},
  pages        = {{17845--17851}},
  publisher    = {{The American Chemical Society (ACS)}},
  series       = {{ACS Applied Materials and Interfaces}},
  title        = {{Realization of Ultrahigh Quality InGaN Platelets to be Used as Relaxed Templates for Red Micro-LEDs}},
  url          = {{http://dx.doi.org/10.1021/acsami.0c00951}},
  doi          = {{10.1021/acsami.0c00951}},
  volume       = {{12}},
  year         = {{2020}},
}