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- 2018
-
Mark
Nanoimprint stamps with ultra-high resolution : Optimal fabrication techniques
(
- Contribution to journal › Article
- 2003
-
Mark
Fluorescence microscopy for quality control in nanoimprint lithography
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2002
-
Mark
Improving stamps for 10 nm level wafer scale nanoimprint lithography
(
- Contribution to journal › Article