Lars Montelius

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2004
Mark Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
Whitlow, Harry J ^LU ; Ng, May Ling ^LU ; Auzelyte, Vaida ^LU ; Maximov, Ivan ^LU ; Montelius, Lars ^LU ; van Kan, JA ; Bettiol, AA and Watt, F (2004) In Nanotechnology 15(1). p.223-226
- Contribution to journal › Article
Mark Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
Keil, M ; Beck, Marc ^LU ; Frennesson, G ; Theander, E ; Bolmsjo, E ; Montelius, Lars ^LU and Heidari, B (2004) In Journal of Vacuum Science and Technology B 22(6). p.3283-3287
- Contribution to journal › Article
Mark Dry release of suspended nanostructures
Forsen, E ; Davis, ZJ ; Dong, M ; Ghatnekar-Nilsson, Sara ^LU ; Montelius, Lars ^LU and Boisen, A (2004) In Microelectronic Engineering 73-74. p.487-490
- Contribution to journal › Article
Mark Overview: nanotechnology in life science
Montelius, Lars ^LU (2004) NSF/SSF Workshop on Nanoscience and Nanotechnology, 2004
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist
Forsén, E ; Nilsson, S G ; Carlberg, Patrick ^LU ; Abadal, G ; Pérez-Murano, F ; Esteve, J ; Montserrat, J ; Figueras, E ; Campabadal, F and Verd, J , et al. (2004) Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint – a tool for realizing nano-bio research
Carlberg, Patrick ^LU ; Johansson, F ; Mårtensson, Thomas ^LU ; Beck, Marc ^LU ; Persson, F ; Nilsson, S G ; Bunk, R ; Borgström, Magnus ^LU ; Graszyk, M and Maximov, Ivan ^LU , et al. (2004) 8th International Conference on Nanometer-Scale Science and Technology, 2004
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint - a tool for realizing nano-bio research
Carlberg, Patrick ^LU ; Johansson, F ; Mårtensson, Thomas ^LU ; Bunk, Richard ^LU ; Beck, Marc ^LU ; Persson, F ; Borgström, Magnus ^LU ; Nilsson, S G ; Heidari, B and Grazcyk, M , et al. (2004) 2004 4th IEEE Conference on Nanotechnology p.199-200
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Mega-dense nanoarrays: the challenge of novel antibody microarray formats
Wingren, Christer ^LU ; Montelius, Lars ^LU and Borrebaeck, Carl ^LU (2004)
- Chapter in Book/Report/Conference proceeding › Book chapter
Mark Nanowire arrays - a toolbox for the future
Mårtensson, Thomas ^LU ; Borgström, Magnus ^LU ; Carlberg, Patrick ^LU ; Dick Thelander, Kimberly ^LU ; Montelius, Lars ^LU ; Seifert, Werner ^LU and Samuelson, Lars ^LU (2004) 8th International Conference on Nanometer-Scale Science and Technology, 2004
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping
Forsén, E ; Carlberg, Patrick ^LU ; Montelius, Lars ^LU and Boisen, A (2004) Micro Nano Engin, 2003
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding

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