Lars Montelius

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2004
Mark Nanoimprint – a tool for realizing nano-bio research
Carlberg, Patrick ^LU ; Johansson, F ; Mårtensson, Thomas ^LU ; Beck, Marc ^LU ; Persson, F ; Nilsson, S G ; Bunk, R ; Borgström, Magnus ^LU ; Graszyk, M and Maximov, Ivan ^LU , et al. (2004) 8th International Conference on Nanometer-Scale Science and Technology, 2004
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Overview: nanotechnology in life science
Montelius, Lars ^LU (2004) NSF/SSF Workshop on Nanoscience and Nanotechnology, 2004
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
Keil, M ; Beck, Marc ^LU ; Frennesson, G ; Theander, Elke ^LU ; Bolmsjö, E ; Montelius, Lars ^LU and Heidari, B (2004) 48 th Intl Conf on Electron, Ion and Photon Beam Technol and Nanofabric, San Diego, Ca, USA (2004)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist
Forsén, E ; Nilsson, S G ; Carlberg, Patrick ^LU ; Abadal, G ; Pérez-Murano, F ; Esteve, J ; Montserrat, J ; Figueras, E ; Campabadal, F and Verd, J , et al. (2004) Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Dry release of suspended nanostructures
Forsén, E ; Davis, Z J ; Dong, M ; Nilsson, S G ; Montelius, Lars ^LU and Boisen, A (2004) Micro Nano Engin, 2003
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
Beck, Marc ^LU ; Persson, F ; Carlberg, Patrick ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU ; Ling, TGI and Montelius, Lars ^LU (2004) In Microelectronic Engineering 73-74. p.837-842
- Contribution to journal › Article
2003
Mark Fabrication and mechanical characterization of ultrashort nanocantilevers
Ghatnekar-Nilsson, Sara ^LU ; Sarwe, Eva-Lena ^LU and Montelius, Lars ^LU (2003) In Applied Physics Letters 83(5). p.990-992
- Contribution to journal › Article
Mark Nano-aperture fabrication for single quantum dot spectroscopy
Håkanson, Ulf ^LU ; Persson, Jonas ^LU ; Persson, Filip ^LU ; Svensson, Hans ^LU ; Montelius, Lars ^LU and Johansson, Mikael K-j ^LU (2003) In Nanotechnology 14(6). p.675-679
- Contribution to journal › Article
Mark Lift-off process for nanoimprint lithography
Carlberg, Patrick ^LU ; Graczyk, Mariusz ^LU ; Sarwe, Eva-Lena ^LU ; Maximov, Ivan ^LU ; Beck, Marc ^LU and Montelius, Lars ^LU (2003) 28th International Conference on Micro- and Nano-Engineering, 2002 67-8. p.203-207
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark A comparison of thermally and photochemically cross-linked polymers for nanoimprinting
Pfeiffer, K ; Reuther, F ; Fink, M ; Gruetzner, G ; Carlberg, Patrick ^LU ; Maximov, Ivan ^LU ; Montelius, Lars ^LU ; Seekamp, J ; Zankovych, S and Sotomayor-Torres, C M , et al. (2003) In Microelectronic Engineering 67-8. p.266-273
- Contribution to journal › Article

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