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2021
Mark Sequential infiltration synthesis and pattern transfer using 6 nm half-pitch carbohydrate-based fingerprint block copolymer
Löfstrand, Anette ^LU ; Jafari Jam, Reza ^LU ; Mumtaz, Muhammad ; Mothander, Karolina ^LU ; Nylander, Tommy ^LU ; Vorobiev, Alexei ; Rahaman, Ahibur ^LU ; Chen, Wen Chang ; Borsali, Redouane and Maximov, Ivan ^LU (2021) Advances in Patterning Materials and Processes XXXVIII 2020 In Proceedings of SPIE - The International Society for Optical Engineering 11612.
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Poly(styrene)- block-Maltoheptaose Films for Sub-10 nm Pattern Transfer : Implications for Transistor Fabrication
Löfstrand, Anette ^LU ; Jafari Jam, Reza ^LU ; Mothander, Karolina ^LU ; Nylander, Tommy ^LU ; Mumtaz, Muhammad ; Vorobiev, Alexei ; Chen, Wen Chang ; Borsali, Redouane and Maximov, Ivan ^LU (2021) In ACS Applied Nano Materials 4(5). p.5141-5151
- Contribution to journal › Article

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