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- 2005
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Mark
An alignment procedure for nanoimprint lithography at the sub-20 nm level
2005) 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2004
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Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
(
- Contribution to journal › Article
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Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
2004) Micro Nano Engin, 2003(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
-
Mark
Nanoimprint – a tool for realizing nano-bio research
2004) 8th International Conference on Nanometer-Scale Science and Technology, 2004(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint - a tool for realizing nano-bio research
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2003
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Mark
Fluorescence microscopy for quality control in nanoimprint lithography
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP
(
- Contribution to journal › Article
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Mark
Lift-off process for nanoimprint lithography
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2002
-
Mark
Polymer stamps for nanoimprinting
(
- Contribution to journal › Article
-
Mark
Fabrication of Si-based nanoimprint stamps with sub-20 nm features
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding