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- 2006
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Mark
Measurements of the stopping forces for heavy ions in Ge, Ag and Au using novel 'polka-dot' detectors
2006) In Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms 251(2). p.352-360(
- Contribution to journal › Article
-
Mark
An electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography
2006) Intl Conf on Nanoimprint and Nanoprint Technology, 2006(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint and reactive etching for fabrication of Si/SiO2 NEMS structures
2006) 14th Intl Symp “Nanostructures: Physics and Technology”, 2006(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint-based fabrication and characterization of interdigitated cantilevver array
2006) International Conference on Nanoscience and Technology, 2006(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2005
-
Mark
Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithography
(
- Contribution to journal › Article
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Mark
Nanoimprint technology for fabrication of tunable grating structures
2005) 31st Intl Conf Micro- and Nano-Engineering, 2005(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
An alignment procedure for nanoimprint lithography at the sub-20 nm level
2005) 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2004
-
Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
(
- Contribution to journal › Article
-
Mark
Energy loss measurements for mass-14 ions using a patterned stopping medium on a PIN diode
2004) In Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms 219-20. p.263-267(
- Contribution to journal › Article
-
Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
2004) Micro Nano Engin, 2003(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2003
-
Mark
Lift-off process for nanoimprint lithography
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP
(
- Contribution to journal › Article
- 2002
-
Mark
Fabrication of Si-based nanoimprint stamps with sub-20 nm features
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Next generation nanotechnologies for sensor array fabrication
2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
-
Mark
Nanoimprint in mr-L 6000.1 XP/PMMA resist system
2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
-
Mark
Polymer stamps for nanoimprinting
(
- Contribution to journal › Article
-
Mark
Improving stamps for 10 nm level wafer scale nanoimprint lithography
(
- Contribution to journal › Article
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