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2006
Mark Nanoimprint-based fabrication and characterization of interdigitated cantilevver array
Luo, Gang ^LU ; Ghatnekar-Nilsson, Sara ^LU ; Maximov, Ivan ^LU ; Graczyk, Mariusz ^LU ; Carlberg, Patrick ^LU ; Adolph, David ^LU ; Hessman, Dan ^LU ; Zhu, T ; Liu, Z and Xu, Hongqi ^LU , et al. (2006) International Conference on Nanoscience and Technology, 2006
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nano imprint lithography and fast fourier transform for guiding and quantifying neurons and their extensions
Carlberg, Patrick ^LU ; Johanssen, F ; Kanje, M and Montelius, Lars ^LU (2006) Intl Conf on Nanoimprint and Nanoprint Technology, 2006
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
2005
Mark Guiding molecular motors with nano-imprinted structures
Bunk, Richard ^LU ; Carlberg, Patrick ^LU ; Mansson, A ; Nicholls, IA ; Omling, Pär ^LU ; Sundberg, M ; Tagerud, S and Montelius, Lars ^LU (2005) In Japanese Journal of Applied Physics 44(5A). p.3337-3340
- Contribution to journal › Article
Mark The use of nanoimprint lithography for creation of biomaterial surfaces and structures
Montelius, Lars ^LU ; Carlberg, Patrick ^LU ; Bunk, R ; Sundberg, M ; Rosengren, J ; Nicholls, I ; Tågerud, S ; Månsson, A ; Hällström, Waldemar ^LU and Prinz, Christelle ^LU , et al. (2005) MRS (Materials Research Society) Fall Meeting & Exhibit, 2005
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint technology for fabrication of tunable grating structures
Luo, Gang ^LU ; Maximov, Ivan ^LU ; Graczyk, Mariusz ^LU ; Adolph, David ^LU ; Carlberg, Patrick ^LU ; Zhu, T ; Liu, Z ; Xu, Hongqi ^LU and Montelius, Lars ^LU (2005) 31st Intl Conf Micro- and Nano-Engineering, 2005
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark An alignment procedure for nanoimprint lithography at the sub-20 nm level
Adolph, David ^LU ; Bolmsjö, E ; Theander, Elke ^LU ; Saers, R ; Graczyk, Mariusz ^LU ; Hessman, Dan ^LU ; Maximov, Ivan ^LU ; Andersson-Engels, Stefan ^LU ; Persson, Anders ^LU and Wahlström, Claes-Göran ^LU , et al. (2005) 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint lithography and life science applications
Montelius, Lars ^LU ; Carlberg, Patrick ^LU ; Bunk, R ; Sundberg, M ; Rosengren, J ; Nicholls, I ; Tågerud, S ; Omling, Pär ^LU ; Månsson, A and Hällström, Waldemar ^LU , et al. (2005) 31st Intl Conf Micro- and Nano-Engineering, 2005
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
2004
Mark Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist
Forsen, E ; Ghatnekar-Nilsson, Sara ^LU ; Carlberg, Patrick ^LU ; Abadal, G ; Perez-Murano, F ; Esteve, J ; Montserrat, J ; Figueras, E ; Campabadal, F and Verd, J , et al. (2004) In Nanotechnology 15(10). p.628-633
- Contribution to journal › Article
Mark Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
Beck, Marc ^LU ; Persson, F ; Carlberg, Patrick ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU ; Ling, TGI and Montelius, Lars ^LU (2004) In Microelectronic Engineering 73-74. p.837-842
- Contribution to journal › Article
Mark Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping
Forsen, E ; Carlberg, Patrick ^LU ; Montelius, Lars ^LU and Boisen, A (2004) In Microelectronic Engineering 73-74. p.491-495
- Contribution to journal › Article

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