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2019
Mark Sub-10 nm Block Copolymer Lithography: Sequential Infiltration Synthesis into Poly(Styrene)-block-Maltoheptaose
Löfstrand, Anette ^LU ; Suyatin, Dmitry ^LU ; Nilsson, Nicklas ; Otsuka, Issei ; Kvennefors, Anders ^LU ; Ring, Johan ; Borsali, Redouane and Maximov, Ivan ^LU (2019) 5-th DSA Symposium
- Contribution to conference › Poster
2018
Mark Nanoimprint stamps with ultra-high resolution : Optimal fabrication techniques
Graczyk, Mariusz ^LU ; Cattoni, Andrea ; Rösner, Benedikt ; Seniutinas, Gediminas ; Löfstrand, Anette ^LU ; Kvennefors, Anders ^LU ; Mailly, Dominique ; David, Christian and Maximov, Ivan ^LU (2018) In Microelectronic Engineering 190. p.73-78
- Contribution to journal › Article
Mark Block Copolymer Nanopatterning of Dielectric Mask for Selective Area InAs Vertical Nanowire Growth
Löfstrand, Anette ^LU ; Graczyk, Mariusz ^LU ; Suyatin, Dmitry ^LU ; Kvennefors, Anders ^LU ; Maximov, Ivan ^LU ; Svensson, Johannes ^LU and Wernersson, Lars-Erik ^LU (2018) 4-th International Symposium on DSA, November 11-13, 2018, Sapporo, Japan
- Contribution to conference › Abstract
Mark High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching
Khan, Sabbir Ahmed ; Suyatin, Dmitry ^LU ; Sundqvist, Jonas ^LU ; Graczyk, Mariusz ^LU ; Junige, Marcel ; Kauppinen, Christoffer ; Kvennefors, Anders ^LU ; Huffman, Maria ^LU and Maximov, Ivan ^LU (2018) In ACS Applied Nano Materials p.2476-2482
- Contribution to journal › Article
2015
Mark III-V Nanowire Synthesis by Use of Electrodeposited Gold Particles.
Jafari Jam, Reza ^LU ; Heurlin, Magnus ^LU ; Jain, Vishal ^LU ; Kvennefors, Anders ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU ; Borgström, Magnus ^LU ; Pettersson, Håkan ^LU and Samuelson, Lars ^LU (2015) In Nano Letters 15(1). p.134-138
- Contribution to journal › Article
2012
Mark Digital in-line holography on amplitude and phase objects prepared with electron beam lithography.
Schwenke, Jörg ^LU ; Lorek, Eleonora ^LU ; Rakowski, Rafal ^LU ; He, Xinkui ^LU ; Kvennefors, Anders ^LU ; Mikkelsen, Anders ^LU ; Rudawski, Piotr ^LU ; Heyl, Christoph ^LU ; Maximov, Ivan ^LU and Pettersson, Sven-Göran ^LU , et al. (2012) In Journal of Microscopy 247(2). p.196-201
- Contribution to journal › Article
Mark Optimization of a self-closing effect to produce nanochannels with top slits in fused silica
Graczyk, Mariusz ^LU ; Balaz, Martina ^LU ; Kvennefors, Anders ^LU ; Linke, Heiner ^LU and Maximov, Ivan ^LU (2012) In Journal of Vacuum Science and Technology B 30(6).
- Contribution to journal › Article

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