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2006
Mark High resolution 100kV electron beam lithography in SU-8
Bilenberg, B. ; Jacobsen, S. ; Schmidt, M.s. ; Skjolding, L.h.d. ^LU ; Shi, P. ; Bøggild, P. ; Tegenfeldt, J.O. ^LU and Kristensen, A. (2006) Micro- and Nano-Engineering MNE 2005 In Microelectronic Engineering 83(4-9). p.1609-1612
- Contribution to journal › Article
2003
Mark Lift-off process for nanoimprint lithography
Carlberg, Patrick ^LU ; Graczyk, Mariusz ^LU ; Sarwe, Eva-Lena ^LU ; Maximov, Ivan ^LU ; Beck, Marc ^LU and Montelius, Lars ^LU (2003) 28th International Conference on Micro- and Nano-Engineering, 2002 67-8. p.203-207
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Fluorescence microscopy for quality control in nanoimprint lithography
Finder, C ; Beck, Marc ^LU ; Seekamp, J ; Pfeiffer, K ; Carlberg, P ; Maximov, Ivan ^LU ; Reuther, F ; Sarwe, Eva-Lena ^LU ; Zankovich, S and Ahopelto, J , et al. (2003) 28th International Conference on Micro- and Nano-Engineering, 2002 67-8. p.623-628
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint-induced effects on electrical and optical properties of quantum well structures
Zankovych, S ; Maximov, I ; Shorubalko, Ivan ^LU ; Seekamp, J ; Beck, Marc ^LU ; Romanov, S ; Reuter, D ; Schafmeister, P ; Wieck, AD and Ahopelto, J , et al. (2003) 28th International Conference on Micro- and Nano-Engineering, 2002 67-8. p.214-220
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production
Bogdanov, Alexei L. ^LU ; Holmqvist, Tommy ^LU ; Jedrasik, Piotr and Nilsson, Bengt ^LU (2003) In Microelectronic Engineering 67-68. p.381-389
- Contribution to journal › Article
2002
Mark Fabrication of Si-based nanoimprint stamps with sub-20 nm features
Maximov, Ivan ^LU ; Sarwe, Eva-Lena ^LU ; Beck, Marc ^LU ; Deppert, Knut ^LU ; Graczyk, Mariusz ^LU ; Magnusson, Martin ^LU and Montelius, Lars ^LU (2002) Micro and Nano Engineering 2001 61-2. p.449-454
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
1999
Mark Single-electron devices via controlled assembly of designed nanoparticles
Junno, Tobias ; Magnusson, Martin H. ^LU ; Carlsson, Sven Bertil ; Deppert, Knut ^LU ; Malm, Jan Olle ^LU ; Montelius, Lars ^LU and Samuelson, Lars ^LU (1999) Proceedings of the 1998 4th International Symposium on New Phenomena in Mesoscopic Structures (NPMS'98) In Microelectronic Engineering 47(1-4). p.179-183
- Contribution to journal › Article

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