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- 2018
-
Mark
Nanoimprint stamps with ultra-high resolution : Optimal fabrication techniques
Graczyk, Mariusz LU ; Cattoni, Andrea ; Rösner, Benedikt ; Seniutinas, Gediminas ; Löfstrand, Anette LU ; Kvennefors, Anders LU ; Mailly, Dominique ; David, Christian and Maximov, Ivan LU
(2018)
In Microelectronic Engineering
190.
p.73-78
- Contribution to journal › Article
- 2017
-
Mark
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Romano, L. ; Vila-Comamala, J. ; Kagias, M. LU
; Vogelsang, K.
; Schift, H.
; Stampanoni, M.
and Jefimovs, K.
(2017)
In Microelectronic Engineering
176.
p.6-10
- Contribution to journal › Article
- 2015
-
Mark
In Situ Characterization of Nanowire Dimensions and Growth Dynamics by Optical Reflectance
Heurlin, Magnus LU ; Anttu, Nicklas LU ; Camus, Christian ; Samuelson, Lars LU and Borgström, Magnus LU
(2015)
In Nano Letters
15(5).
p.3597-3602
- Contribution to journal › Article
- 2005
-
Mark
Actin-based molecular motors for cargo transportation in nanotechnology - Potentials and challenges
Mansson, A ; Sundberg, M ; Bunk, Richard LU ; Balaz, M ; Nicholls, I A ; Omling, Pär LU ; Tegenfeldt, Jonas LU
; Tagerud, S
and Montelius, Lars
LU
(2005)
In IEEE Transactions on Advanced Packaging
28(4).
p.547-555
- Contribution to journal › Article
- 2003
-
Mark
Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production
- Contribution to journal › Article
- 2002
-
Mark
Fabrication of Si-based nanoimprint stamps with sub-20 nm features
Maximov, Ivan LU
; Sarwe, Eva-Lena
LU
; Beck, Marc
LU
; Deppert, Knut
LU
; Graczyk, Mariusz
LU
; Magnusson, Martin
LU
and Montelius, Lars
LU
(2002)
Micro and Nano Engineering 2001
61-2.
p.449-454
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding